Robotics
ABM107B-S-CE-S2-ASML
Brooks Automation Bottom-Mount Atmospheric Wafer Robot
About this part
ABM107B-S-CE-S2-ASML is a customer-configured Brooks Automation atmospheric robot for semiconductor wafer handling. The ABM107B geometry identifies bottom mounting, a 7.1-inch Z stroke, and 7.2-inch wide-arm construction. The remaining code identifies a cassette-mapping/scanner option, CE and SEMI S2 safety provisions, and an ASML-specific configuration. Replacement units must be matched by the complete model code and serial-specific configuration data because customer builds can differ in end effector, interfaces, controller files, and accessories
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation; legacy equipment is also associated with PRI Automation |
| Full configured model | ABM107B-S-CE-S2-ASML |
| Associated Brooks spare-part number | 6-0002-0989-SP |
| Robot type | Atmospheric bottom-mount single-arm wafer-handling robot |
| Robot axes | Theta, radial, and vertical (Z) axes |
| Z stroke | 7.1 in (ABM107B model geometry) |
| Arm-link configuration | 7.2 in wide-arm variant (107B) |
| Cassette mapping | S option; the family option matrix defines S as a cassette mapper/scanner |
| Regulatory configuration | CE-marked and SEMI S2-designated configuration; unit-level compliance is established from the product marking and applicable declaration or certificate |
| Supported wafer sizes | Atmospheric single-arm robot family: 75 to 300 mm (3 to 12 in) |
| Repeatability | Atmospheric single-arm robot family: ±25 µm at 3 sigma |
| Cleanroom rating | Atmospheric single-arm robot family: Class 1 |
| Operating temperature | Atmospheric single-arm robot family: 15 to 32.5 °C (59 to 89 °F) |
| Storage temperature | Atmospheric single-arm robot family: −20 to 40 °C (−4 to 104 °F) |
| Humidity | Atmospheric single-arm robot family: 10% to 80% relative humidity, non-condensing |
| Maximum operating altitude | Atmospheric single-arm robot family: 1,000 m above sea level |
| Recommended vacuum source | Atmospheric single-arm robot family: 25 in Hg at greater than 1 SCFM free flow |
What Does ABM107B-S-CE-S2-ASML Mean?
The manufacturer family manual defines the principal geometry and option codes. The ASML suffix identifies a customer-specific build whose detailed interface changes require its build drawing or label documentation.
| Segment | Field | Interpretation |
|---|---|---|
| ABM | Mounting and robot family | Atmospheric Bottom Mount single-arm robot. |
| 107B | Geometry | 7.1-inch Z stroke with 7.2-inch arm links; B denotes the wide-arm variant. |
| S | Robot option | Cassette mapper/scanner option in the Brooks family configuration matrix. |
| CE | Regulatory option | CE-marked configuration. Confirm unit compliance from its CE mark and Declaration of Conformity. |
| S2 | Safety designation | Configuration associated with SEMI S2 safety provisions. Unit-level certification should be confirmed from the label or Brooks Certificate of Compliance. |
| ASML | Customer/application suffix | ASML-specific configured build. The public family manual does not define its connector, end-effector, controller, or interface differences. |
Integration and Replacement Notes
- The robot is a subsystem intended for integration into a host tool; it is not documented as a stand-alone machine.
- The matching controller must contain the parameter and macro files for the robot’s serial number. Brooks instructs users replacing a robot or controller to verify that the resident robot serial number and parameter file agree.
- Generic family drawings may not represent a customer-specific build. Use the complete model code, physical label, serial-specific parameter file, and applicable dimensional or interface drawing when selecting a replacement.
- Do not assert an exact vacuum-line count, end-effector type, connector pinout, controller model, or wafer size for this configured unit without its nameplate, build drawing, or manufacturer service record.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS REPAIR 6-0002-0835-SP,ABM405-1-S-CE-S293,ABM107B-S-CE-S2-ASML,SC-81-CE