Wafer Robotics
ABM405
Brooks Automation Atmospheric Bottom-Mount Wafer Robot
About this part
Brooks Automation ABM405, written ABM-405 in the manufacturer manual, is a legacy atmospheric single-arm wafer-handling robot designed for bottom mounting in host equipment. The manufacturer configuration matrix assigns the model a 5.25-inch arm link and 13.3-inch Z stroke. Vacuum-line count, scanner, flipper, regulatory configuration, end effector, and customer integration depend on suffixes and build records rather than the ABM405 base identifier
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation; the manual superseded an earlier PRI Automation OEM Systems manual |
| Manufacturer model notation | ABM-405 |
| Product type | Atmospheric single-arm robot |
| Mounting configuration | Atmospheric Bottom Mount |
| Arm-link length | 5.25 in (133.35 mm) |
| Z-axis stroke | 13.3 in (337.82 mm) |
| Robot axes | T (rotational), R (radial), and Z (vertical) |
| Repeatability | ±25 µm at 3 sigma |
| Documented wafer-size range | 75–300 mm (3–12 in); the configured end effector and integration may impose a narrower range |
| Cleanroom rating | Class 1 |
| Operating temperature | 15–32.5 °C (59–89 °F) |
| Storage temperature | −20–40 °C (−4–104 °F) |
| Humidity | 10–80% RH, non-condensing |
| Maximum operating altitude | 1,000 m above sea level |
| Recommended vacuum source | 25 in Hg at greater than 1 SCFM free flow |
| Bottom-mount fasteners | Four user-supplied 1/4-20 UNC or M6 cap screws |
| Minimum base-plate thickness | 0.5 in (12.5 mm) aluminum or 0.38 in (9.6 mm) steel |
| Ventilation clearance | At least 2 in (50.8 mm) at robot and controller fan vents |
What Does ABM405 Mean?
The base identifier establishes mounting style and model geometry; it does not establish optional hardware or regulatory configuration.
| Segment | Field | Interpretation |
|---|---|---|
| ABM | Mounting configuration | Atmospheric Bottom Mount |
| 405 | Model/geometry code | Manufacturer configuration-matrix entry with a 5.25-inch arm link and 13.3-inch Z stroke |
Documented Configuration Suffixes
These suffixes describe configured variants in the manufacturer manual. Their absence from ABM405 means the corresponding option cannot be assumed.
| Suffix | Documented meaning | Applicability boundary |
|---|---|---|
| -1 | Single vacuum line | Only when present in the configured model code |
| -2 | Dual vacuum lines | Only when present in the configured model code |
| -S | Cassette mapper/scanner | Only when present in the configured model code |
| -F | Flipper | Only when present in the configured model code |
| -CE | CE-marked configuration | Confirm the physical CE mark and Declaration of Conformity for the unit |
| -WET | Wet-process configuration | The manual limits this option to 7-inch or 10-inch Z travel |
| -S293 | Not defined in Revision 1 | Observed on configured units; requires a label, Quality Report, certificate, or manufacturer build record for authoritative interpretation |
Configuration and Compliance Boundary
The robot is intended for integration into a host system, not stand-alone operation. Exact hardware and compliance must be established from the configured-unit record.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,659.59 to $19,800.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS ATM ROBOT ABM405 pn 6-0002-1049-SP (Amat 0520-00041)