Brooks Automation / PRI Automation Single-Arm Atmospheric Bottom-Mount Wafer Robot
About this part
ABM407B-1-S-B-CE-S293 identifies a three-axis Brooks Automation / PRI Automation Equipe AXM 400-series wafer robot for bottom-mounted atmospheric operation. The manufacturer configuration matrix defines the 407B platform as a 7.2-inch wide-arm model with a 13.3-inch configured Z stroke; the suffixes identify one vacuum line, cassette mapping/scanning, a CE option, and an S2-93 safety configuration. The additional B segment is present in the exact identifier but is not defined by the located manufacturer code key. End-effector geometry, installed controller, firmware, safety certificates, and customer integration should be matched to the physical unit
Configurations vary. Verify the exact unit before choosing a replacement.
ManufacturerBrooks Automation / PRI Automation (Equipe)
Part numberABM407B-1-S-B-CE-S293
Product familyConfiguration-specific
Device typeWafer Handling Assembly
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics
Specifications
Identification
Manufacturer lineage
Brooks Automation / PRI Automation / Equipe
Robot architecture
Single-arm, three-axis atmospheric wafer-handling robot with theta, radial, and vertical Z axes
Configured model
Mounting orientation
Atmospheric bottom mount (ABM)
Arm geometry
407B wide-arm configuration with 7.2 in arm links
Configured Z stroke
13.3 in in the manufacturer configuration matrix; the 2004 AXM 400 brochure gives a rounded 13 in general Z-axis range
Vacuum lines
One vacuum line, denoted by the -1 segment
Mapping option
Cassette mapper/scanner, denoted by the -S segment
Additional B option
Configured option present; its definition is not established by the located manufacturer ordering-code documentation
Regulatory configuration
CE option
CE-mark configuration indicated by the -CE segment; compliance should be verified from the unit's CE mark and Declaration of Conformity
S2-93 option
SEMI S2-93 safety configuration indicated by the S293 suffix in legacy Brooks/PRI catalog usage; verify the applicable certificate for the physical unit
Mechanical
Rated payload
407B platform: 1.5 lb (0.68 kg)
End-effector mounting pattern
407B platform: four 6-32 threaded locations on a 2.000 in diameter bolt circle
Robot mounting
11.500 in robot-hole diameter; three 0.25 in through holes on a 12.350 in diameter bolt circle
Dead zone
25 degrees
Motion
Radial range
2 × 7.20 in for the 407B wide-arm configuration
Theta range
335 degrees
Typical axis speeds
Radial 24 in/s; theta 360 degrees/s; Z 10 in/s
Performance
Throughput
AXM 400 family: less than 4 seconds per wafer per pick-and-place cycle
Documented repeatability
The September 2005 family manual states ±25 µm at 3 sigma. The April 2004 AXM 400 brochure states typical radial and Z repeatability of ±0.002 in (±50.8 µm) at 3 sigma and theta repeatability of ±0.02 degrees at 3 sigma; use the build-specific acceptance specification where these values differ
Substrate handling
Platform capability
AXM 400 platform designed for wafers and reticles up to 300 mm; actual substrate compatibility depends on the installed end effector, sensor, and system integration
Cleanroom
Compatibility
Class 1 cleanroom compatible
Facilities
Nominal weight
AXM 400 family: 60 lb (27.2 kg)
Vacuum
AXM 400 brochure requirement: 18–24 in Hg; family manual recommends a 25 in Hg source at greater than 1 SCFM free flow
Electrical input
100–240 VAC, 50/60 Hz; family manual lists 100/120 VAC at 5 A or 220/240 VAC at 2.5 A
Environment
Operating temperature
Atmospheric Single-Arm Robot family: 15–32.5 °C (59–89 °F)
Storage temperature
Atmospheric Single-Arm Robot family: -20–40 °C (-4–104 °F)
Atmospheric Single-Arm Robot family: 1,000 m above sea level
Reliability
MTBF
AXM 400 family: greater than 40,000 hours
Control and integration
Controller family
Designed to operate with an ESC-200 Series Equipe Smart Controller; the exact controller variant is not established by this robot identifier
Documented communications
Family manual: Ethernet for normal host operation and RS-232 for setup and test
What Does ABM407B-1-S-B-CE-S293 Mean?
The manufacturer configuration matrix defines most of the identifier. The separate B option remains intentionally undecoded because no manufacturer code key establishing its meaning was located.
Segment
Field
Interpretation
ABM
Mounting family
Atmospheric Bottom Mount
407B
Mechanical model
400-series robot with 7.2-inch wide-arm geometry and 13.3-inch configured Z stroke
1
Vacuum configuration
Single vacuum line
S
Sensor option
Cassette mapper/scanner
B
Additional option
Unknown configured option; do not equate it with the documented optional Z-axis brake without an exact build record or manufacturer code key
CE
Regulatory option
CE-mark configuration; verify the mark and Declaration of Conformity for the unit
S293
Safety configuration
Legacy SEMI S2-93 option designation; verify the applicable certificate for the unit
Compatibility and Replacement
Milara's current Equipe AXM 400 Generation 2 family is presented as a fully compatible direct replacement for Equipe Generation 1 robots. Replacement selection for this configured unit still requires matching the 407B end-effector interface, wide-arm reach, bottom-mount geometry, vacuum and mapper provisions, safety I/O, controller behavior, firmware commands, and customer-specific integration.
Family Manual Service Schedule
The Brooks family manual gives the following baseline schedule for clean, dry, inert service conditions. More demanding environments require adjusted intervals.
