Brooks Automation Communication and Interface Board
About this part
AEZ02 is a Brooks Automation board identifier or revision/model marker seen on communication, network, and interface PCB listings. Stored Sonisys auction records and listing records tie AEZ02 to Brooks board part numbers including 812100065 / 013501-165-I1, 013501-165-I4, and 812100064 / 013501-166-I1. Some evidence identifies 013501-166-I1 / AEZ02 with FIXLOAD 6 communication-board use, while other listings identify 013501-165-I1 and 013501-165-I4 as network, communication, or interface boards. Exact tool compatibility, firmware, board revision, connector use, and service substitution must be verified from the board label and installed system
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryBoards and Controllers
Specifications
Identification
Part identifier
AEZ02
Device type
Brooks Automation communication, network, or interface board assembly depending on exact board number
Brand lineage
Brooks Automation semiconductor automation service part
Observed board numbers
812100065
Stored and listing evidence identifies 812100065 as a Brooks Automation communication board / network interface PCB associated with 013501-165-I1 AEZ02
013501-165-I1
Stored and listings identify 013501-165-I1 AEZ02 as a Brooks Automation communication or network interface PCB
013501-165-I4
Stored and listings identify 013501-165-I4 AEZ02 as a Brooks Automation interface board PCB
812100064 / 013501-166-I1
Stored and listings identify 812100064 and 013501-166-I1 AEZ02 with Brooks network/communication board wording
Observed system context
FIXLOAD 6
Stored and listing evidence connects 013501-166-I1 Rev AEZ02 to Brooks Automation FIXLOAD 6 communication-board context
TAS300 context
Semiconductor-equipment inventory lists 812100064 / 013501-16-17AEZ02 with TAS300 wording
Configuration
Configured-unit rule
Board function, firmware, revision, compatible tool, connector mapping, and replacement suitability vary by complete board number and installed system
Applications
Application domain
Semiconductor automation service, load-port or tool communication boards, network interface boards, and Brooks Automation board replacement workflows
Compatibility
Tool-fit caution
AEZ02 should not be used alone as a compatibility guarantee; match the full Brooks board number, revision, firmware label, and tool requirement
Documents
Documentation status
No official exact AEZ02 Brooks board datasheet or service manual is currently available in the Sonisys document archive
Part Photos
36 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records9Tracked historical listing records
Historical median price$212.48Based on archived listing records
Recorded price range$129.00 - $599.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $145.80 to $402.35. Based on 9 archived listing records; not a current offer, appraisal, or confirmed sale price.