Wafer Robotics
ATM-105-1-S-CE-S293
Brooks Automation / PRI / Equipe Atmospheric Wafer-Handling Robot
About this part
The manufacturer configuration matrix resolves ATM-105 as a top-mounted atmospheric single-arm robot with a 5.25-inch arm link and 7.1-inch Z stroke. The configured suffixes document one vacuum line, a cassette mapper/scanner option, and CE marking. The final S293 suffix is retained as part of the exact identifier but is not decoded by the available manufacturer manual
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Exact model | ATM-105-1-S-CE-S293 |
| Mounting arrangement | Atmospheric top mount (ATM) |
| Robot type | Single-arm, three-axis wafer-handling robot |
| Controlled axes | Theta (T), radial (R), and vertical (Z) |
| Arm-link length | 5.25 in (documented ATM-105 matrix value) |
| Z-axis stroke | 7.1 in (documented ATM-105 matrix value) |
| Vacuum lines | One (single-vacuum configuration) |
| Cassette mapping | Mapper/scanner option included |
| Regulatory option | CE-marked configuration |
| Repeatability | ±25 µm at 3 sigma for the atmospheric single-arm robot family |
| Cleanliness rating | Cleanroom Class 1 for the atmospheric single-arm robot family |
| Operating temperature | 15 to 32.5 °C (59 to 89 °F) |
| Relative humidity | 10% to 80%, non-condensing |
| Maximum operating altitude | 1,000 m above sea level |
| Recommended vacuum source | 25 in Hg at greater than 1 SCFM free flow |
What Does ATM-105-1-S-CE-S293 Mean?
The manufacturer manual defines the base mechanical code and standard option suffixes. The final suffix remains undecoded pending an official ordering-code source or exact factory record.
| Segment | Field | Interpretation |
|---|---|---|
| ATM | Mounting architecture | Atmospheric top-mount robot |
| 105 | Mechanical configuration | 5.25-inch arm link with 7.1-inch Z stroke |
| 1 | Vacuum option | Single vacuum line |
| S | Cassette-handling option | Mapper/scanner |
| CE | Regulatory option | CE-marked configuration |
| S293 | Additional suffix | Unknown option value; not defined in Brooks manual 127206 Revision 1 |
Controller and Integration Requirements
The robot is a component of a host wafer-handling system rather than a stand-alone machine. Exact controller firmware, parameter files, end effector, scanner model, cables, and host-tool compatibility must match the installed unit.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $8,500.00 to $8,500.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks PRI Equipe ATM-105-1-S-CE-S293 Wafer Transfer Robot