Wafer Robotics
ATM-107-2-S-CE-S293
Brooks Automation / PRI / Equipe Atmospheric Top-Mount Wafer-Handling Robot
About this part
ATM-107-2-S-CE-S293 identifies a three-axis atmospheric top-mount robot from the Equipe/PRI/Brooks product lineage. The manufacturer configuration matrix maps ATM-107 to a 7.1-inch Z stroke and 7.2-inch arm link; the configured suffixes specify dual vacuum, a cassette mapper/scanner, and the CE Mark option. S293 is retained without expansion because the manufacturer ordering table reviewed does not define that suffix
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Exact model identifier | ATM-107-2-S-CE-S293 |
| Mounting configuration | Atmospheric top mount |
| Z-axis stroke | 7.1 in (about 180 mm) |
| Arm-link length | 7.2 in (about 183 mm) |
| Vacuum option | Dual vacuum lines; this does not establish that a dual end effector is installed |
| Mapping option | Cassette mapper/scanner; the exact scanner manufacturer and model are not encoded |
| Regulatory option | CE Mark option; confirm the physical CE mark and unit-specific Declaration of Conformity |
| Trailing option suffix | S293; its expansion is not defined in the reviewed manufacturer ordering table |
| Motion axes | Three polar-coordinate axes: T (arm rotation), R (arm reach/retraction), and Z (vertical movement) |
| Repeatability | ±25 µm at 3 sigma |
| Manufacturer wafer-size range | 75–300 mm (3–12 in); the installed end effector and tool integration determine the usable size for a configured unit |
| Cleanroom classification | Cleanroom Class 1 |
What Does ATM-107-2-S-CE-S293 Mean?
The manufacturer configuration matrix directly defines ATM, ATM-107, and the 2, S, and CE options. The trailing S293 segment is preserved but not expanded.
| Segment | Field | Interpretation |
|---|---|---|
| ATM | Mounting family | Atmospheric Top Mount |
| 107 | Base mechanical configuration | 7.1-inch Z stroke with a 7.2-inch arm link |
| 2 | Vacuum configuration | Dual vacuum lines |
| S | Mapping option | Cassette mapper/scanner |
| CE | Regulatory option | CE Mark option; unit compliance should be confirmed from its mark and Declaration of Conformity |
| S293 | Additional configured suffix | Not defined in the reviewed manufacturer ordering table; a unit quality report, certificate, or manufacturer build record is required to expand it |
Manufacturer Family Integration
The atmospheric single-arm robot is a component of an ESC-controlled wafer-handling system. These family interfaces do not establish which controller, cables, end effector, or accessories accompany a particular unit.
Part Photos
4 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $750.00 to $750.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS PRI ATM-107-2-S-CE-S293 WAFER HANDLER BOTTOM PANEL, ROBOT, 191861