Wafer Robotics
ATM105-1-S
Brooks Automation / PRI 3-Axis Atmospheric Wafer-Handling Robot
About this part
ATM105-1-S is a legacy three-axis atmospheric wafer-transfer robot. Its manufacturer-defined configuration provides top mounting, a 5.25-inch arm-link geometry, 7.1-inch Z stroke, one vacuum line, and the cassette mapper/scanner option. The robot operates as part of a controller-based wafer-handling system; end effector, wafer compatibility, controller model, firmware, and serial-specific parameter files must be verified for the individual installation
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Mounting and environment | Atmospheric top mount |
| Robot architecture | Single-arm, three-axis robot with theta, radial, and Z motion |
| Arm-link length | 5.25 in |
| Z stroke | 7.1 in |
| Vacuum option | One vacuum line |
| Mapping option | Cassette mapper/scanner |
| Wafer-size envelope | 75 to 300 mm (3 to 12 in); exact-unit capability depends on the installed end effector and system integration |
| Repeatability | 3-sigma repeatability of ±25 µm |
| Cleanroom rating | Cleanroom Class 1 |
| Operating temperature | 15 to 32.5 °C (59 to 89 °F) |
| Storage temperature | -20 to 40 °C (-4 to 104 °F) |
| Humidity | 10% to 80% RH, non-condensing |
| Maximum operating altitude | 1000 m above sea level |
| Recommended vacuum source | 25 in Hg at greater than 1 SCFM free flow |
| Controller/system AC input | 92 to 260 VAC, 47 to 63 Hz; nominal ratings are 100/120 VAC at 5 A or 220/240 VAC at 2.5 A |
| Controller requirement | Brooks/PRI Smart Controller (ESC); the exact controller and firmware are not encoded by ATM105-1-S |
What Does ATM105-1-S Mean?
The manufacturer configuration matrix uses the punctuated form ATM-105-1-S. Every segment of the supplied identifier is defined by that matrix.
| Segment | Field | Interpretation |
|---|---|---|
| ATM | Mounting and environment | Atmospheric top-mount robot |
| 105 | Robot geometry | 7.1-inch Z stroke with 5.25-inch arm links |
| 1 | Vacuum configuration | Single vacuum line |
| S | Accessory option | Cassette mapper/scanner |
Cassette Mapping Function
The S option denotes a robot-mounted optical scanner used while the Z axis traverses a wafer cassette. The controller compares detected reflections with expected slot positions to identify present, missing, and cross-slotted wafers and construct a wafer map. The manufacturer classifies systems fitted with approved scanning devices as Class 1 laser products; posted laser precautions still apply.
Controller Replacement and Setup
- Use the parameter file supplied for the robot's serial number and confirm that the controller-reported serial number matches the robot body.
- When replacing a controller, transfer the correct parameter and macro files from the original controller or the media supplied with the robot.
- Do not infer controller, firmware, end-effector, pre-aligner, cable, or station compatibility from ATM105-1-S alone.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $950.90 to $8,550.10. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- NEW Brooks ATM105-1-S Robot w Software PN 6-0002-0324-SP