Wafer Robotics

ATR8

Brooks Automation Reliance Wafer Transfer Robot

About this part

ATR8 is a Brooks Automation Reliance atmospheric wafer transfer robot identifier observed across Sonisys auction records and surplus references. The archive evidence connects ATR8 with wafer transfer robots, Series 8 controller/cable contexts, prealigner sets, and several Brooks/OEM part numbers, while exact wafer size, arm configuration, end effector, controller revision, firmware, and tool compatibility must be verified from the physical unit and OEM documentation

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Automation
Part numberATR8
Product familyConfiguration-specific
Device typeWafer Transfer Robot
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
Device typeAtmospheric wafer transfer robot / wafer handling robot
Series familyBrooks Automation Reliance ATR8 / ATR-8
Observed Brooks part-number contextsStored auction and surplus evidence associates ATR8 with Brooks part numbers including 107434, 121669, 151864, 151865, 152465, and related robot/controller/cable assemblies
Applications
Application domainSemiconductor wafer handling, atmospheric transfer, cassette/load-port transfer, process-tool integration, and service replacement contexts
Robot
Robot configuration boundaryATR8 units may appear as robot-only assemblies, robot/controller/prealigner/cable sets, or tool-specific configured assemblies; do not infer one universal arm, blade, sensor, or controller configuration
Wafer-size boundaryAnd auction records include 200 mm and 300 mm contexts for ATR8-family equipment; verify the supported wafer size from the exact nameplate, end effector, controller configuration, and installed tool
Controller
Controller contextATR8 records commonly appear with Brooks Series 8 controller, robot controller, signal cable, motor cable, prealigner, and interface cable references
Integration
Tool/OEM contextRepair and surplus references associate Reliance ATR8 robots with LAM, Novellus, KLA/KLA-Tencor, SUSS, August, Camtek, FEI, and other semiconductor tool contexts
Service
Replacement-unit ruleATR8 replacements should be matched by complete Brooks/OEM part number, controller type, firmware/configuration files, cable set, mounting orientation, end effector, and tool-specific calibration requirements
Configuration
Configured-unit ruleRevision, firmware, harnessing, connector set, arm length, end effector, mapping/grip sensors, controller package, and tool compatibility vary by the physical unit and installed system

Part Photos

14 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records12Tracked historical listing records
Historical median price$10,000.00Based on archived listing records
Recorded price range$160.00 - $45,000.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $804.72 to $29,000.00. Based on 12 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • BROOKS AUTOMATION WAFER TRANSFERING ROBOT 151865 ATR8 RELIANCE
  • BROOKS AUTOMATION 151865 WAFER TRANSFERRING ROBOT ATR8 RELIANCE
  • BROOKS AUTOMATION 121669 WAFER TRANSFER ROBOT ATR8 RELIANCE
  • Brooks ATR8 Robot/ Robot Controller/ 151862-0008/ Prealigner, Cables
  • Brooks Automation 152465 Wafer Transfer Robot Reliance ATR8 OEM Refurbished

Archived listings

Other Part Numbers & Aliases

ATR8ATR-8Brooks ATR8Brooks ATR-8Brooks Automation ATR8Brooks Automation ATR-8Brooks Reliance ATR8Brooks Automation Reliance ATR8