Flow Control
C09-50237
Celerity UFC-9861 Mass Flow Controller
About this part
C09-50237 is an observed configuration identifier associated with a Celerity UFC-9861 high-temperature mass flow controller. Exact-number listing and archived image evidence identify a 1 SLM GeCl4 configuration and an associated cable assembly. Official Brooks Instrument documentation confirms that the 9861 series was developed by Unit Instruments and Celerity before Brooks acquired the product assets; the official documents do not name C09-50237, so fittings, electrical options, mounting attitude, and calibration details require verification from the controller labels
Unit-specific configuration
Historical listing records identify 1 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Configuration identifier | C09-50237 |
| Observed legacy manufacturer | Celerity |
| Observed model | UFC-9861 |
| Full-scale flow | 1 SLM |
| Process gas | GeCl4 (germanium tetrachloride) |
| Product class | Metal-sealed, digital, high-temperature thermal mass flow controller or meter |
| Standard full-scale flow range | 3 sccm to 10 slm, N2 equivalent |
| Ambient temperature range | 0 to 150 °C (32 to 302 °F) |
| Current product status | Legacy Brooks Instrument 9861 high-temperature mass flow controller series |
Part Photos
3 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $75.99 to $363.99. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- NEW Brooks Instrument 800-802-1003 Mass Flow Controller 1SLM GeC14 C09-50237
- NEW Brooks Instrument C09-50237 Mass Flow Controller Cable Assy 1SLM GeC14 Amp