Brooks Instrument XacTorr Heated Digital Capacitance Manometer
About this part
CMX100 is the 100 deg C member of the Brooks Instrument XacTorr CMX Series heated digital capacitance manometer family. It is an absolute-pressure vacuum gauge platform for semiconductor and process-vacuum measurement, with configured pressure range, fitting, electrical interface, relay options, compliance marking, and calibration orientation encoded in the full CMX model number. Stored Sonisys auction records include 2 Torr, 10 Torr, and 1000 Torr CMX100 examples
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics
Specifications
Identification
Part identifier
CMX100
Device type
Heated digital capacitance manometer / capacitance diaphragm gauge
Product family
Brooks XacTorr CMX Series
Model temperature
CMX100 is the 100 deg C operating-temperature model
Measurement
Pressure measurement type
Absolute pressure measurement with capacitance diaphragm sensing
Gas dependency
Capacitance manometer measurement is independent of gas composition
Measurement range
CMX family documentation states four decades of measurement range from full scale
Configured ranges
Full-scale pressure options
Model-code options include mTorr and Torr full-scale ranges through 1000 Torr depending on configuration
Accuracy
Typical family accuracy
CMX documentation lists range-dependent accuracy values, commonly 0.15 percent or 0.25 percent of reading for many ranges
Materials
Exposed wetted materials
Inconel and/or AISI 316L stainless steel
Pressure
Overpressure limit
17 PSIA or 125 percent of full scale, whichever is greater
Electrical
Analog output
0 to 10 VDC pressure output
Communications
RS-485 service port
2.5 mm mini jack RS-485 communications port
DeviceNet option
DeviceNet configurations use a 5-pin Eurofast connector with 9-pin female D-sub analog connection
Configuration
Configured-unit rule
The exact pressure range, fitting, electrical connector, relay option, compliance option, and calibration orientation must be read from the full model code and physical label
