Vacuum and Cryogenics

CMX3T012N

Brooks Instrument XacTorr CMX160 Capacitance Manometer

About this part

CMX3T012N is a configured Brooks Instrument XacTorr CMX-series digital vacuum capacitance manometer identifier. Official Brooks CMX family documentation decodes the visible ordering code as a CMX160 160 C heated capacitance manometer with 1 Torr full-scale range, 15-pin Male Sub-D electrical connector, and 4 VCR 1/4 inch female fitting. Sonisys auction records also identify the exact part number as a Brooks XacTorr CMX160 1 Torr unit, but auction evidence is used only for identity, observed configuration, image, and historical price context. no verified official exact-part-only PDF naming CMX3T012N is currently available

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberCMX3T012N
Product familyCMX160
Device typeHeated digital capacitance manometer
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics

Specifications

Identification
Part identifierCMX3T012N
Manufacturer contextBrooks Instrument
Device typeXacTorr CMX Series digital vacuum capacitance manometer / capacitance diaphragm gauge
Ordering code
Model and regulated temperatureBrooks CMX ordering-code position II value 3 decodes to CMX160, a 160 C heated sensor configuration
Full-scale pressure rangeOrdering-code value T01 decodes to 1 Torr full scale
Electrical connectorOrdering-code value 2 decodes to a 15-pin Male Sub-D electrical connector
Process fittingOrdering-code value N decodes to a 4 VCR 1/4 inch female fitting
Calibration orientationThe Brooks CMX ordering table lists blank calibration code as horizontal and V as vertical; CMX3T012N has no visible V suffix, but orientation should still be verified from the physical label and calibration record
Performance
Family accuracy contextThe Brooks CMX data sheet lists CMX160 accuracy as +/-0.25% of reading within the stated accuracy range
Response and warm-up contextThe Brooks CMX data sheet lists 40 ms pressure response time and 4 hour warm-up time for full-scale ranges at or below 1 Torr
Materials
Wetted materialsThe Brooks CMX data sheet lists wetted materials as Inconel and/or AISI 316L stainless steel
Electrical
CMX160 power contextThe Brooks CMX data sheet lists CMX160 power consumption as +24 V +/-10% at 1 A or +/-15 Vdc at 1 A
Applications
Application domainVacuum pressure measurement for semiconductor, process, and other vacuum-dependent equipment where the configured pressure range, fitting, orientation, and electrical interface match the system requirements

Documentation Downloads

Local PDF copies

Part Photos

4 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$750.00Based on archived listing records
Recorded price range$300.00 - $1,200.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $390.00 to $1,110.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • New BROOKS Digital XacTorr Capacitance Manometer CMX160 P/N: CMX3T012N 1 Torr
  • NEW BROOKS XacTorr CMX3 Capacitance Manometer CMX3T012N Model CMX160 1 Torr 160C

Archived listings

Other Part Numbers & Aliases

CMX3T012NBrooks CMX3T012NBrooks Instrument CMX3T012NBrooks XacTorr CMX3T012N