Semiconductor Alignment And Calibration Equipment
EL-3000-A3
Brooks MicroTool Electronic Level Wafer
About this part
EL-3000-A3 identifies a Brooks Automation / MicroTool electronic level wafer. The archived unit is a PC-based 300 mm configuration intended for measuring pitch and roll during semiconductor wafer-handling alignment. EL-family documentation establishes remote numerical and graphical readout, earth-level and learned-reference modes, damping, and calibration functions. Exact EL-3000-A3 metrology values and the meaning of the A3 suffix are not documented and must not be inferred from the later EL-3003
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer and product brand | Brooks Automation / MicroTool |
| Exact model | EL-3000-A3 |
| Product family | EL-Series electronic level wafer |
| Nominal wafer size | 300 mm |
| Display platform | PC-based |
| Measurement axes | Two-axis pitch and roll readout |
| Reference modes | Leveling to earth or to a user-defined learned reference plane |
| Remote readout | Graphical bubble display with simultaneous numerical pitch and roll values |
| Processing functions | Damping, reference setting, and calibration modes |
| Typical applications | Leveling and alignment on semiconductor end effectors, wafer-handling blades, cassettes, and process interfaces |
Metrology Values and Model Boundary
Manufacturer literature documents the later 300 mm EL-3003, not the exact EL-3000-A3. The later model's values must not be assigned to this record.
| Identifier and document scope | Accuracy near zero | Repeatability | Resolution | Total range |
|---|---|---|---|---|
| EL-3000-A3 exact model | Not documented | Not documented | Not documented | Not documented |
| EL-3003 — Brooks next-generation catalog sheet | ±0.02° | ±0.02° | 0.001° | ±8° |
| EL-3003 Rev B — MicroTool manufacturer sheet | ±0.02° | ±0.01° | 0.001° | ±8° |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $999.00 to $999.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS MICROTOOL PC BASED EL-3000-A3 300MM ELECTRONIC LEVEL WAFER