Vacuum and Cryogenics
IS-320FE
Edwards CTI-Cryogenics On-Board IS 320FE Cryopump
About this part
The On-Board IS 320FE is a 320-size cryopump documented for ion-implant vacuum systems. Its closed-cycle helium refrigerator, two cryogenic arrays, integrated valves, heaters, sensors, microprocessor control, RS-232 interface, and network support provide clean high-vacuum pumping and automated regeneration. Manufacturer specifications rate the model for 11,000 L/s water, 3,600 L/s nitrogen, 12,500 L/s hydrogen, and 3,000 L/s argon pumping speeds
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Model | On-Board IS 320FE |
| Manufacturer lineage | Edwards CTI-Cryogenics; legacy manufacturer manuals are branded Brooks Automation and Helix Technology |
| Manufacturer performance-table part number | 8185049G001 |
| Documented application class | Ion-implant vacuum systems |
| Water pumping speed | 11,000 L/s |
| Nitrogen pumping speed | 3,600 L/s |
| Hydrogen pumping speed | 12,500 L/s |
| Argon pumping speed | 3,000 L/s |
| Hydrogen capacity | 30 standard liters at 5 × 10^-6 Torr |
| Crossover | 300 Torr-liters |
| Weight | 100 lb |
| Vacuum and regeneration hardware | Roughing valve, purge valve, cryopump thermocouple gauge, first- and second-stage diode sensors, and first- and second-stage heaters |
| Communications | Integrated RS-232 host interface and On-Board IS intercomponent networking |
| Control architecture | Integrated microprocessor, variable-speed motor, heaters, valves, and temperature and pressure sensors |
| Module input power | 208 VAC nominal; 180–253 VAC range, 5 A, 50/60 Hz, single phase |
| Roughing connection | N/NW-25 ISO-KF flange |
| Roughing-system capacity | 17–20 cfm for 250/320-size pumps when using FastRegen; roughing-pump blank-off pressure below 20 microns |
| Multifunction-valve pilot | 60–80 psig through a 1/4-inch one-touch tube connection |
| Purge nitrogen | 25–30 psig, minimum 4.25 scfm, through a 1/8-inch female NPT connection |
| Pressure-relief exhaust adapter | 1/2-inch female NPT |
| On-Board IS family vacuum range | 10^-3 to 10^-9 Torr |
Configuration and Assembly-Number Boundary
IS 320FE identifies the cryopump model, while the longer 8185-series number identifies an assembly configuration.
How the On-Board IS Cryopump Works
Gas entering the pump is captured on two cryogenically cooled arrays. The first-stage array normally operates at 65–120 K and primarily condenses water vapor. The second-stage array operates at 10–20 K and condenses air gases such as nitrogen, oxygen, and argon; activated charcoal on that array adsorbs hydrogen, helium, and neon. A closed-cycle Gifford-McMahon refrigerator uses compressed helium supplied by a remote On-Board IS compressor. Because this is a capture pump, periodic regeneration releases accumulated gas and restores capacity.
Documented Regeneration Timing
Cold-to-cold times are manufacturer maximums for the stated system arrangements and conditions.
| Mode | System arrangement | Maximum time | Condition |
|---|---|---|---|
| Full regeneration | 1 pump / 1 compressor | ≤150 minutes | Includes 20-minute extended purge |
| Full regeneration | 3 pumps / 1 compressor | ≤150 minutes | Includes 20-minute extended purge; TI = 100 K |
| Fast regeneration | 1 pump / 1 compressor | ≤75 minutes | Manufacturer performance table |
| Fast regeneration | 3 pumps / 1 compressor | ≤75 minutes | TI = 100 K |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $9,999.00 to $9,999.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- CTI-CRYOGENICS ON-BOARD IS-320FE CRYOPUMP 8185134G001 BROOKS