Vacuum and Cryogenics
IS-8F
CTI-Cryogenics Brooks On-Board Cryopump
About this part
IS-8F is an On-Board IS 8F cryopump identifier from the CTI-Cryogenics / Brooks Automation cryogenic vacuum product line, now supported through Edwards. The exact installed part number and array or valve configuration can vary by unit, but Brooks documentation identifies the On-Board IS 8F flat cryopump as a high-vacuum capture pump with integrated roughing/purge hardware, temperature sensing, heaters, RS-232 communication, and On-Board IS controller/network operation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerCTI-Cryogenics / Brooks Automation / Edwards
Part numberIS-8F
Product familyConfiguration-specific
Device typeOn-Board IS 8F flat cryopump
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics
Specifications
Identification
| Device type | On-Board IS 8F flat cryopump |
| Brand lineage | CTI-Cryogenics / Helix / Brooks Automation product line with current Edwards vacuum support context |
| Documented reference configuration | Brooks On-Board IS 8F cryopump table references part number 8185038 with chevron array |
Configuration
| Configured-unit rule | Installed part number, chevron or sputter/inlet configuration, multi-function valve options, controller/module presence, AMAT/OEM part number, and service state vary by physical unit |
Applications
| Application domain | High-vacuum and semiconductor process-chamber cryogenic pumping |
Operating principle
| Pump type | Capture cryopump using cryogenic condensation and adsorption on first-stage and second-stage arrays |
| Operating pressure context | Brooks manual describes On-Board IS cryopumps as pumping gases in the 10^-3 to 10^-9 torr range |
Performance
| Water pumping speed | 4,000 liters/sec for the documented On-Board IS 8F chevron-array configuration |
| Nitrogen pumping speed | 1,500 liters/sec for the documented On-Board IS 8F chevron-array configuration |
| Hydrogen pumping speed | 2,200 liters/sec for the documented On-Board IS 8F chevron-array configuration |
| Argon pumping speed | 1,200 liters/sec for the documented On-Board IS 8F chevron-array configuration |
| Argon throughput at 20K | 250 to 700 sccm, depending on system configuration |
Capacity
| Argon capacity | 1000 standard liters at 5 x 10^-6 torr; 750 standard liters at 5 x 10^-7 torr with recovery in 30 seconds |
| Hydrogen capacity | 12 standard liters at 5 x 10^-6 torr |
| Nitrogen capacity | 550 standard liters with recovery to 5 x 10^-7 torr in 30 seconds |
| Crossover | 150 torr-liters |
Regeneration
| Full regeneration | Cold-to-cold full regeneration is documented at 90 minutes or less for one pump/one compressor, and 120 minutes or less for five pumps/one compressor, with one minute extended purge |
| Fast regeneration | Fast regeneration is documented at 35 minutes or less for one pump/one compressor, and 60 minutes or less for five pumps/one compressor |
Integrated hardware
| Included functions | Roughing valve, purge valve, cryopump TC gauge, first-stage diode, second-stage diode, first-stage heater, second-stage heater, and RS-232 interface |
Controls
| Control system | Microprocessor-based On-Board IS control system for monitoring and control of vacuum-system functions |
| Remote and host communication | Remote control through RS-232 protocol; multiple cryopumps can be networked through BITBUS to an IS Controller for coordinated operation and regeneration |
| Network address context | On-Board IS module address selector establishes network address 0-9, with channel B used for pump addresses 10-19 |
Mechanical
| Weight | 67 lb for the documented On-Board IS 8F chevron-array configuration |
Installation
| Mounting orientation | Brooks installation manual states the On-Board IS cryopump may be installed on the vacuum-system high-vacuum valve flange in any orientation without affecting performance |
| System components | Typical system includes the cryopump, On-Board IS compressor, helium supply/return lines, IS Controller, host RS-232 connection, and intercomponent network |
Thermal stages
| First-stage array | First-stage array normally operates at 65K to 120K and primarily pumps water vapor and hydrocarbons |
| Second-stage array | Second-stage array operates at 10K to 20K for gases including nitrogen, oxygen, argon, carbon dioxide, and carbon monoxide; activated charcoal cryoadsorbs hydrogen, helium, and neon |
Compressor compatibility
| IS-1000 compressor context | Edwards states the IS-1000 compressor supports up to six On-Board IS-8F cryopumps in the same footprint as a 9600 compressor |
Observed identifiers
| Stored auction part numbers | 0190-25016, 0190-54089, 8185148G001, 8185118G001R, and 8185147G001R appear in stored IS-8F auction evidence |
Documentation Downloads
Local PDF copiesPart Photos
9 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records5Tracked historical listing records
Historical median price$12,000.00Based on archived listing records
Recorded price range$7,500.00 - $12,500.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $8,899.60 to $12,500.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- CTI-Cryogenics Brooks Applied On-Board IS-8F Cryopump 0190-54089
- BROOKS 8185148G001 ON-BOARD IS-8F CTI-CRYOGENICS CYROPUMP
- CTI-CRYOGENICS ON-BOARD IS-8F CRYOPUMP BROOKS 8185118G001R EDWARDS VACUUM
- CTI-CRYOGENICS ON-BOARD IS-8F CRYOPUMP 8185147G001R BROOKS AUTOMATION
- CTI-CRYOGENICS BROOKS ON-BOARD IS-8F CRYOPUMP AMAT 0190-25016
Archived listings
Other Part Numbers & Aliases
IS-8FOn-Board IS-8FOn-Board IS 8FCTI-Cryogenics IS-8FCTI-Cryogenics On-Board IS-8FBrooks On-Board IS-8F