Wafer Robotics

MAG70

Brooks Automation MagnaTran FPD Vacuum Robot Drive

About this part

Brooks Automation Mag70 is a three-axis MagnaTran Series 70 drive for transferring flat-panel-display substrates in vacuum process equipment. It has a 50 mm vertical stroke and supports substrates up to 650 × 830 mm when fitted with an appropriate arm and end effector. Top- and bottom-mount drives use separate Brooks part numbers, so MAG70 alone does not define the complete robot configuration

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (1)Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Automation MagnaTran Series 70

Part numberMAG70

Product familyMag70

Device typeVacuum Transfer Robot

Configuration statusConfiguration varies

Application classVacuum and cryogenic systems

CategoryWafer Robotics

Specifications

Identification

Manufacturer	Brooks Automation
Product family	MagnaTran Series 70
Model	Mag70

Application

Function

Flat-panel-display substrate transfer in vacuum process equipment

Mag70 Drive

Axes of motion	Three: R (radial), θ (rotational), and Z (vertical)
Z-axis stroke	50 mm
Maximum documented substrate size	Up to 650 × 830 mm with an appropriate configured arm and end effector
Mounting configurations	Top mount or bottom mount; each orientation has a distinct drive part number
Documented arm type	BiSymmetrik
Legacy arm compatibility	Designed to extend use of Mag60 armsets and end effectors

MagnaTran Series 70 Platform

Radial-axis repeatability	0.1 mm (3σ)
Rotational-axis repeatability	0.003° (3σ)
Vertical-axis repeatability	0.1 mm (3σ)
Base vacuum	10^-7 Torr
Helium leak rate	Less than 1 × 10^-9 standard cc/s He
Drive temperature limit	80°C exposure
Arm/end-effector temperature limit	120°C operating
Facility power	180–240 VAC, 50–60 Hz, 20 A
Drive power	48 VDC at 40 A
Control interfaces	Switch-selectable RS-232/RS-422 serial; handheld control module through the serial port; 22-input/20-output miscellaneous parallel I/O; additional RS-232 peripheral port

Design

Drive construction	Compact direct-drive mechanism without dynamic seals, drive belts, or drive cables
Control electronics	Integral DSP-based control electronics
Access control	PASIV programmable access safety zones

Documented Mag70 Component Options

Brooks lists separate drive, arm, and end-effector part numbers for configuring a Mag70 system. The installed labels are required to establish the configuration of an individual robot.

Component	Brooks part number	Documented configuration
Drive	002-3700-02	Top mount; 50 mm Z stroke
Drive	002-3700-03	Bottom mount; 50 mm Z stroke
BiSymmetrik arm	001-5870-32	Mag70; 1.8 m extension
BiSymmetrik arm	001-5870-34	Mag70; 1.94 m extension
End effector	002-2134-02	Mag70 BiSymmetrik; 370 × 470 mm substrate
End effector	002-2134-01	Mag70 BiSymmetrik; 550 × 650 mm through 600 × 700 mm substrates
End effector	002-2135-02	Mag70 BiSymmetrik; 400 × 500 mm through 580 × 650 mm substrates
End effector	002-2135-01	Mag70 BiSymmetrik; 500 × 650 mm substrate

Series 70 Drive Distinctions

Mag70, Mag74, and Mag77 are related but distinct Series 70 drives and must not be treated as aliases.

Drive	Z stroke	Documented role
Mag70	50 mm	Supports configured substrates up to 650 × 830 mm and extends use of Mag60 armsets and end effectors
Mag74	50 mm	Uses an additional shaft and more robust armsets for longer extensions and heavier, larger substrates
Mag77	300 mm	Provides substantially greater vertical travel but requires more space below the transfer module

Configuration Boundary

MAG70 identifies the drive platform rather than a complete fixed robot assembly. The drive part number establishes mounting orientation, while separate arm and end-effector labels establish extension and substrate compatibility. The manufacturer’s listed end effectors are configuration examples and do not justify assigning one universal substrate format to every Mag70 unit.

Documentation Downloads

Local PDF copies

MagnaTran Series 70 (FPD Robot): Flat Panel Display Robots for Vacuum Process Applications Local PDF download

PDF321 KB

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$99.99Based on archived listing records

Recorded price range$99.99 - $99.99Low to high recorded listing price

Local documents1PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

SEMICONDUCTOR ROBOT BROOKS REPAIR MAG-8,MAG70,MAG70,ATR-8_LAM,MAG74

Archived listings

Other Part Numbers & Aliases

MAG70Brooks Automation MAG70Brooks Automation MagnaTran 70