Flow Control
MF51XA4BK2D2CAA
Brooks Thermal Mass Flow Controller
About this part
Brooks MF51XA4BK2D2CAA is an Mf Series Mfx thermal mass flow controller for industrial gas service. The MF51X base model has an integral solenoid control valve, welded sensor construction, and a NEMA 4X/IP66 enclosure. The archived configured unit is identified as a 30 slpm controller calibrated for 96% nitrogen and 4% oxygen at a 70°F reference temperature
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument Mf Series (Mfx)
Part numberMF51XA4BK2D2CAA
Product familyConfiguration-specific
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classIndustrial automation and process equipment
CategoryFlow Control
Specifications
Identification
| Manufacturer | Brooks Instrument |
| Product series | Mf Series, Mfx construction variant |
Function
| Device function | Thermal mass-flow measurement and closed-loop gas-flow control using an integral precision solenoid valve |
Measurement
| Documented MF51 full-scale span | 10–100 slpm nitrogen equivalent at 0°C and 101 kPa; the exact archived unit is observed at 30 slpm |
Performance
| Control/usable range | 50:1 for the documented Mf family |
| Accuracy | ±1% of full scale, including linearity, at calibrated conditions |
| Repeatability | 0.25% of rate |
| Response time | Less than 6 seconds to within 2% of full scale of the final value for a 0–100% command change |
Process
| Maximum operating pressure | 1000 psig (68 bar) for the documented MF51 base model |
| Controller differential pressure | 10–50 psid for the documented MF51 base model |
| Ambient/gas temperature | 41–149°F (5–65°C) |
Construction
| Sensor construction | Welded sensor/body assembly for the Mfx variant |
| Enclosure rating | NEMA 4X / IP66 watertight industrial enclosure |
Electrical
| Power requirement | 22–28 Vdc effective operating range for MF51; 309 mA at 22 Vdc and 370 mA at 28 Vdc |
| Available setpoint interfaces | 4–20 mA or 0–5 Vdc; the configured selection is not established by the available exact-part evidence |
| Supported flow outputs | 0/4–20 mA and 0–5 Vdc; the selected current range is jumper-dependent |
Control
| Low-command cutoff | The control valve is positioned fully closed below 1% of full scale |
| Valve override | Electrical override supports fully open and fully closed valve commands |
Integrity
| Outboard leak integrity | 1 × 10^-9 atm·cc/s helium, excluding permeation |
Certification
| Mfx hazardous-location classification | UL/cUL listed and recognized, nonincendive: Class I, Division 2, Groups A–D; Class II, Division 2, Groups F–G; suitable for Class III, Division 2 |
What Does MF51XA4BK2D2CAA Mean?
Manufacturer documentation supports decoding the MF51X base-model portion. The remaining configured suffix requires a Brooks factory configuration record or readable product label.
| Segment | Field | Interpretation |
|---|---|---|
| MF51 | Base model | Brooks Mf Series thermal gas mass flow controller; documented full-scale capability is 10–100 slpm nitrogen equivalent. |
| X | Construction variant | Mfx variant with welded sensor construction, NEMA 4X/IP66 enclosure, and hazardous-location approvals. |
| A4BK2D2CAA | Configured suffix | The available manufacturer documentation does not define these suffix values. Do not assert the fitting, seal material, electrical entry, current range, or other options from this suffix without the factory configuration record. |
Service and Safety Notes
- The Mfx sensor/body assembly is welded and is not field-removable. A sensor that cannot be cleared with clean, dry nitrogen should be returned to Brooks Instrument for service.
- After exposure to toxic, pyrophoric, flammable, or corrosive gas, purge the controller thoroughly with a dry inert gas before disconnecting it from the process.
- Restrictor replacement is intended for trained personnel, and recalibration should be considered after restrictor work.
Documentation Downloads
Local PDF copiesPart Photos
4 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records1Tracked historical listing records
Historical median price$299.99Based on archived listing records
Recorded price range$299.99 - $299.99Low to high recorded listing price
Local documents1PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $299.99 to $299.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS MF51XA4BK2D2CAA MASS FLOW T262547
Archived listings
Other Part Numbers & Aliases
MF51XA4BK2D2CAABrooks MF51XA4BK2D2CAABrooks Instrument MF51XA4BK2D2CAA