Flow Control
MF53IAHB1D1D30A
Brooks Instrument Mf Series Mass Flow Controller
About this part
Brooks Instrument MF53IAHB1D1D30A identifies a configured MF53i industrial thermal mass flow controller. Brooks classifies MF53i as a controller with an integral valve and remote setpoint; MF63i is the measurement-only meter designation. The MF53i uses a removable sensor and rugged NEMA 4X/IP66 packaging. Gas, calibrated flow, signal, pressure and process-connection details remain configuration-specific
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Documented model | MF53i |
| Product type | Industrial thermal mass flow controller |
| Control function | Integral precision control valve with remote setpoint input |
| Sensor construction | Removable sensor for Mfi models |
| Enclosure | NEMA 4X and IP66 |
| Full-scale flow range | 100 to 1000 slpm nitrogen equivalent at 0°C and 101 kPa (760 Torr) |
| Maximum operating pressure | 1000 psi (68 bar) |
| Control/usable range | 50:1 |
| Accuracy | ±1% of full scale, including linearity, at calibrated conditions |
| Repeatability | 0.25% of rate |
| Response time | Less than 6 seconds to within 2% of full scale of the final value for a 0-to-100% command change |
| Standard high-differential valve pressure drop | 30 to 290 psid |
| Optional low-differential valve pressure drop | 7.5 to 30 psid below 500 slpm; 11.8 to 30 psid above 500 slpm |
| Ambient/gas temperature | 5 to 65°C (41 to 149°F) |
| Outboard leak integrity | 1 × 10^-9 atm·cc/s helium, excluding permeation |
| Pressure sensitivity | ±0.03% per psi up to 200 psig with nitrogen |
| Approximate shipping weight | 20 lb (9.1 kg) |
| Supply requirement | 15 to 28 VDC; 240 mA at 15 VDC and 370 mA at 28 VDC |
| Setpoint options | 4–20 mA into 75 ohms or 0–5 VDC into 220 kohms |
| Output options | 0/4–20 mA or 0–5 VDC |
| Documented wetted-material options | Standard stainless-steel wetted parts with Viton fluoroelastomer or Buna-N seals; Kalrez optional |
| Documented connection families | Tube compression, VCO, VCR, NPT, DIN flange and ANSI flange options; exact connection is configuration-specific |
| Model marking | MF53I |
| Calibrated flow marking | 0–49 SCMH CO2 at 1013.25 mbar and 21.11°C |
| I/O signal marking | 4–20 mA / 4–20 mA |
| Power marking | 24 VDC |
| Pressure marking | P1/P2: 100/35 psig |
| Calibration date | 03-May-2019 |
Identifier Interpretation
Only the manufacturer-documented model portion can be decoded conservatively.
Controller or Meter?
MF53i is the mass flow controller designation. MF63i is the corresponding measurement-only meter designation, so MF53IAHB1D1D30A should not be described as a measurement-only mass flow meter.
Installation and Operating Notes
Brooks specifies additional precautions for the MF53 controller.
- The integral control valve provides precision control but is not designed for positive shutoff; install a separate shutoff valve when positive isolation is required.
- Provide at least ten pipe diameters of straight tubing upstream where practical.
- The MF53 uses a dual-stage, pilot-operated valve whose bellows and diaphragm can be damaged by pressure spikes or surges; introduce process pressure carefully during startup.
- Allow approximately 45 minutes after applying power for temperature stabilization before normal operation or a zero check.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $485.10 to $485.10. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks MF53I / MF53IAHB1D1D30A Mass Flow Meter