Flow Control
MF53XA
Brooks MF Series Mass Flow Controller
About this part
MF53XA identifies a Brooks MF Series mass flow controller in the Sonisys archive. Its MF53X model root corresponds to the rugged Mfx controller branch, with an integral control valve, IP66/NEMA 4X enclosure, and hazardous-location approvals. The trailing A is not decoded by the applicable manufacturer literature; the unit label or manufacturer build record is required to establish its exact gas, full-scale flow, connection, valve, seal, and signal configuration
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Exact archive identifier | MF53XA |
| Documented model root | Mf53x — MF Series mass flow controller in the Mfx branch |
| Operating principle | Thermal mass-flow sensing with an integral precision solenoid control valve and remote setpoint input |
| Enclosure | NEMA 4X and IP66 watertight industrial enclosure |
| Sensor assembly | Welded/fixed sensor assembly; manufacturer literature distinguishes this from the removable Mfi sensor |
| Hazardous-location classification | Documented for Mfx models: Class I, Division 2, Groups A–D; Class II, Division 2, Groups F and G; suitable for Class III, Division 2. Confirm the individual unit label before hazardous-area installation |
| Available full-scale span | 100–1000 slpm nitrogen equivalent at 0°C and 101 kPa (760 Torr); this is the model selection span, not the configured MF53XA full scale |
| Control/usable range | 50:1 |
| Accuracy | ±1% of full scale including linearity at calibrated conditions |
| Repeatability | 0.25% of rate |
| Maximum operating pressure | 1000 psi (68 bar) documented model maximum; the unit connection and configuration may impose a lower limit |
| Differential-pressure options | Standard high-differential valve: 30–290 psid. Optional low-differential valve: 7.5–30 psid below 500 slpm or 11.8–30 psid above 500 slpm. Exact valve option is undetermined |
| Response time | Less than 6 seconds to within 2% of full scale for a 0–100% command change |
| Power requirement | 15–28 Vdc; 240 mA at 15 Vdc and 370 mA at 28 Vdc |
| Ambient/gas temperature | 5–65°C (41–149°F) |
| Setpoint options | 4–20 mA into 75 ohms or 0–5 Vdc into 220 kΩ |
| Flow-output options | 0/4–20 mA or 0–5 Vdc; current range is jumper-selectable, and voltage and current outputs are available at separate terminals |
| Wetted-material options | Standard stainless steel with Viton fluoroelastomer or Buna-N; Kalrez was optional. Exact MF53XA elastomer is undetermined |
MF Series Electrical Terminals
Manufacturer terminal assignments applicable to MF53 controllers. Unlisted positions are marked not used in the data sheet.
| Terminal | Label | Function |
|---|---|---|
| TB1-1 | VSUP | Positive supply voltage |
| TB1-2 | SUPCOM | Supply common |
| TB1-4 | SUPCOM | Flow-signal common |
| TB1-5 | VSIG | Voltage flow output |
| TB1-6 | ISIG | Current flow output |
| TB2-2 | GND | Chassis ground |
| TB2-4 | VREF | +5 Vdc reference output |
| TB2-5 | VOR | Valve-override input |
| TB2-7 | CMDCOM | Setpoint-command common |
| TB2-8 | VCMD | Voltage setpoint input |
| TB2-9 | ICMD | Current setpoint input |
| TB3-1 and TB3-2 | — | Controller-valve hookup |
Configuration Details Required
These attributes are factory-configured and cannot be derived from MF53XA alone.
Service Note
The manufacturer manual states that the MF53/MF63 restrictor and bellows-valve assemblies are complex and recommends factory service rather than unsupported field disassembly.
Hazardous-Area Use
Mfx-family approvals describe the certified product design but do not replace inspection of the individual unit’s certification label, enclosure, cable entry, seals, and installation conditions.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $450.00 to $450.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks MF53XA MFseries Mass Flow Controller