Flow Control

MF60S/AC1BA0BA0LA1B13

Brooks Instrument MF Series Smart Mass Flow Meter

About this part

MF60S/AC1BA0BA0LA1B13 is a configured Brooks Instrument MF60S MF Series Smart Mass Flow meter identifier observed in stored Sonisys auction records and exact supplier listings. Official Brooks legacy and Profibus documentation supports MF Smart Series / MF60S family context as elastomer-sealed smart thermal mass-flow-meter equipment, and identifies MF60S/AC as a mass flow meter base model with 0.008 to 30 ln/min full-scale range context. exact listings describe the item as a hydrogen mass flow meter, but no verified official Brooks exact configured-part PDF or build sheet is currently available; gas, calibration range, fittings, seals, electrical option, and area classification should be verified from the physical unit label or calibration paperwork

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberMF60S/AC1BA0BA0LA1B13
Product familyConfiguration-specific
Device typeFlow Meter
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeMF Series smart thermal mass flow meter
Series familyBrooks MF50S-MF64S Smart Mass Flow family; Brooks legacy listings place MF Smart Series under elastomer-sealed thermal mass flow equipment
Base model contextBrooks Profibus documentation lists MF60S/AC as a mass flow meter base model with 0.008 to 30 ln/min full-scale flow range context
Configuration
Configured-unit ruleGas, full-scale range, calibration, process connection, seal package, electrical I/O, communication, conduit entry, calibration option, power input, and area classification vary by configured model code and unit label
Flow
Measurement principleSmart thermal mass flow measurement for gas-flow systems
MF60S/AC range contextBrooks MF-series model-code documentation lists MF60S/AC mass flow meter full-scale ranges from 0.008 to 30 ln/min depending on configuration and calibration
Process connections
Model-code table contextThe Brooks MF-series option table lists code 1B as 1/4 inch tube compression fittings for MF60S-compatible models; confirm the exact installed fittings from the physical unit
Valve
Meter-only contextBrooks MF-series option tables list valve type 0 as meter only with no valve; exact option-code alignment should be confirmed from Brooks build paperwork or the unit label
Enclosure
Environmental protectionMF Series documentation identifies weatherproof IP65 and NEMA 4X protection context
Hazardous-area context
Zone 2 availabilityMF Series documentation identifies CE and Zone 2 hazardous-area context for applicable configurations; the specific approval code for this configured unit should be read from the label
Communications
Signal and digital optionsMF Series documentation describes analog I/O plus RS-232 as well as digital communication options such as RS-232, RS-485, and Profibus-DP depending on configured option
Observed configuration
listing gas contextExact listing records and stored Sonisys auction titles describe this configured identifier as a hydrogen mass flow meter; this is listing evidence, not an official Brooks calibration certificate
Applications
Application domainIndustrial, process gas, outdoor, biotech, and semiconductor gas-flow measurement applications requiring weatherproof mass flow instrumentation

Documentation Downloads

Local PDF copies

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records3Tracked historical listing records
Historical median price$631.82Based on archived listing records
Recorded price range$631.05 - $631.82Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $631.20 to $631.82. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks MF60S/AC1BA0BA0LA1B13 Hydrogen Mass Flow Meter

Archived listings

Other Part Numbers & Aliases

MF60S/AC1BA0BA0LA1B13Brooks MF60S/AC1BA0BA0LA1B13Brooks Instrument MF60S/AC1BA0BA0LA1B13