Flow Control
MF64XA4B1E0BA
Brooks Instrument Smart Thermal Mass Flow Meter
About this part
Brooks Instrument MF64XA4B1E0BA is an MF64-family smart thermal mass flow meter for high gas-flow measurement. Brooks classifies MF64 as a meter and reserves MF50, MF51, and MF53 for controllers with integral valves. The suffix XA4B1E0BA is not decoded by the available MF64S ordering table; gas calibration, full-scale range, pressure rating, connection, seals, signal interface, and approvals remain configured-unit details
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Product classification | MF64-family smart thermal mass flow meter |
| Valve configuration | Meter model; MF64 is not documented as having an integral control valve |
| Measuring principle | Thermal mass-flow sensing for gases |
| Published full-scale envelope | 18–2160 m³n/h, N₂-equivalent; normal reference conditions are 0 °C and 1013.25 mbar |
| Standard flow-output response | 3 seconds; the MF64-specific model-listing note supersedes the manual's generic one-second meter value |
| Pressure applicability | Maximum working pressure depends on line size and selected process connection; 19 bar is not established as an exact manufacturer rating for this identifier |
| Published flow accuracy | ±0.7% of rate plus ±0.2% of full scale at calibration conditions |
| Repeatability | ±0.25% of rate |
| Rangeability | 50:1 within specified accuracy |
| Stability | Less than ±0.5% of rate per year |
| Operating temperature | 0–70 °C for both ambient and process gas |
| Available signal interfaces | Configured options include 0–5 VDC, 1–5 VDC, 0–20 mA, 4–20 mA, RS-232, RS-485, and Profibus-DP; the exact interface is not established for this identifier |
| Enclosure protection | IP65 and NEMA 4X |
| Power requirement | +15 to +28 VDC; 80 mA at 24 VDC (±10%) or 90 mA at 15 VDC (±5%) |
What Does MF64XA4B1E0BA Mean?
Only the MF64 product stem can be decoded from the applicable manufacturer literature. The remaining characters do not conform to the published MF64S ordering structure.
| Segment | Field | Interpretation |
|---|---|---|
| MF64 | Base model and product class | Brooks high-flow Smart thermal mass flow meter; manufacturer model lists classify MF64 as a meter, not a controller. |
| XA4B1E0BA | Configuration suffix | Undecoded. Available MF64S literature uses MF64S/AO through MF64S/AU followed by a longer option structure. Do not assign gas, range, pressure, connection, seals, signals, calibration, or approvals from this suffix without an exact manufacturer record or readable nameplate. |
MF64S Family Flow-Range Matrix
These are documented MF64S family bands, not an identification of the XA4B1E0BA configuration.
| Documented base model | Nominal line size | Published full-scale band |
|---|---|---|
| MF64S/AO | 1.5 inch | 18–80 m³n/h |
| MF64S/AP | 2 inch | 60–140 m³n/h |
| MF64S/AR | 3 inch | 140–320 m³n/h |
| MF64S/AS | 4 inch | 240–540 m³n/h |
| MF64S/AT | 6 inch | 540–1250 m³n/h |
| MF64S/AU | 8 inch | 970–2160 m³n/h |
Legacy Status and Replacement Selection
Brooks lists the MF Smart Series as a legacy family. The current SLAMf family includes a high-flow SLAMf64 meter, but it is not an exact configuration-preserving cross-reference for MF64XA4B1E0BA. Replacement selection must match the original gas calibration, full-scale flow, pressure, line size and connection, seal materials, electrical interface, approvals, and calibration reference.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $299.99 to $299.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- NOS Brooks Instrument 19 Bar 0-1200pph Smart Mass Flow Controller MF64XA4B1E0BA