Wafer Robotics
NXC100
Yaskawa SEMISTAR-M Wafer-Handling Robot Controller
About this part
The Yaskawa NXC100 is a robot-controller designation used in SEMISTAR-M clean-robot systems for semiconductor wafer handling. The documented ERCR-NS01-B004 implementation accepts host commands over RS-232C or Ethernet and coordinates compatible manipulators, tracks, and pre-aligners. Hardware configuration, input voltage, communication method, controlled equipment, end effectors, functions, and software are order-specific; NXC100 alone does not establish those configured details
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Yaskawa Electric Corporation |
| Model designation | NXC100 |
| Documented semiconductor controller type | ERCR-NS01-B004 |
| Series | SEMISTAR-M |
| Host control | Receives commands over RS-232C or Ethernet to control a manipulator, track, and pre-aligner |
| Controller axes | 8 axes |
| System-axis boundary | Yaskawa currently describes NXC100 systems as supporting up to 9 axes; the detailed specification defines 8 controller axes and an expansion-box interface |
| Total motor capacity | 650 W at 35% load factor |
| Input power | Single-phase 100–110 VAC or 200–220 VAC, 50/60 Hz; voltage is internally configured before shipment and must be specified when ordering |
| Power consumption | 400 VA |
| Dimensions (W × H × D) | 425 × 133 × 300 (385) mm, as documented |
| Approximate mass | 14 kg |
| Mounting and cooling | Vertical self-standing or horizontal mounting; forced-air cooling from front inlet to rear outlet |
| Case surface | Nickel plated |
| Operating / storage temperature | 0 to 40 °C / −10 to 60 °C |
| Humidity | 90% RH maximum, non-condensing |
| Altitude | 1,000 m or below |
| Main processing and memory | 667 MHz processor; 128 MB main memory; 128 MB CompactFlash |
| Servo processing | 300 MHz |
| Host and maintenance communications | One RS-232C channel and one 10Base-T/100Base-TX Ethernet channel; communication method is order-specified |
| Host digital inputs | 12 photo-isolated 24 VDC inputs, 5 mA maximum |
| Host digital outputs | 14 photo-isolated 24 VDC outputs, 40 mA maximum |
| Documented manipulators | M101E, M101V, M201E, M201V, M201+, M112E, M112V, M122E, M122V, M114E, M114V, M124E, and M124V |
| Documented tracks | TL0505S/H, TL1010S/H, and TL1515S/H; TLxxxxH tracks require expansion box ERCR-ND10-C000 |
| Compliance basis in Revision 2 specification | SEMI S2-0706 and S8-0705; functional design to SEMI F47-0200; listed design basis also includes UL 61010-1, EN 61000-6-2, EN 61000-6-4, Machinery Directive 2006/42/EC, and ANSI/RIA 10218-1-2007 |
Pre-Aligner Hardware Configurations
Yaskawa defines three order-selected NXC100 hardware configurations according to the pre-aligner.
| Configuration | Pre-aligner support | Documented interpretation |
|---|---|---|
| Specification A | No pre-aligner; PV11a; PV11; PV12M | No pre-aligner, or one-axis suction-type pre-aligners for 200 mm, 300 mm, or 200/300 mm operation |
| Specification B | PE11 | 300 mm edge-grip pre-aligner |
| Specification C | PV32 | Three-axis suction-type pre-aligner for 200/300 mm operation |
NXC100 Construction Boundary
Yaskawa published more than one controller construction under the NXC100 designation. Cabinet, mass, power, pendant, I/O, and compatibility specifications must therefore be tied to the controller type or system documentation.
| Documented implementation | Dimensions | Approximate mass | Primary power |
|---|---|---|---|
| SEMISTAR-M, ERCR-NS01-B004 | 425 × 133 × 300 (385) mm | 14 kg | Single-phase 100–110 or 200–220 VAC |
| Motoman NXC100, DS-265-f | 485 × 183 × 300 mm | 15 kg | Single-phase 200/220 VAC |
Service Note After Extended Power-Off
For NXC100 semiconductor robot systems that develop arm interference or servo-following errors after an extended period without power, Yaskawa directs users to check the programming-pendant alarm history. Alarm 181, absolute-encoder backup error, on all axes can indicate a depleted manipulator battery. After battery replacement, reference-position registration with the dedicated fixture and renewed teaching are required.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $9,500.00 to $9,500.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- YASKAWA ROBOT CONTROLLER ERCR-NS01-B004 NXC100 BROOKS AUTOMATION TSB-1046 SAC001