Brooks Automation / PRI Atmospheric Wafer Pre-Aligner
About this part
PRE-201 is a Brooks Automation / PRI Automation atmospheric wafer pre-aligner used in semiconductor wafer-handling systems. Brooks pre-aligner manual content identifies PRE-201 as a three-axis, pin-loading model for centering wafers and orienting the flat or notch before robotic handoff. Current Brooks Automation pages verify Brooks' semiconductor automation and wafer-handling context, but no current manufacturer-hosted exact PRE-201 PDF or product page was located. Controller pairing, connector set, firmware, calibration files, installed options, and tool compatibility must be verified from the physical unit and system documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Brooks Automation / PRI Automation atmospheric wafer-handling equipment
Device type
Atmospheric wafer pre-aligner
Function
Alignment role
Centers the wafer and orients the flat or notch before wafer handling or placement in the host tool
Motion
PRE-201 axis and loading type
Brooks atmospheric pre-aligner manual content identifies PRE-201 as a three-axis pre-aligner and distinguishes it from PRE-200 by pin-loading hardware
Wafer handling
PRE-201 wafer-size context
The Brooks atmospheric pre-aligner model table places PRE-201 in the 3 to 8 in (76 to 200 mm) wafer-size group
End-effector context
The Brooks atmospheric pre-aligner model table associates PRE-201 pin loading with blade end-effector loading context
Sensing
Optical alignment family features
Brooks atmospheric pre-aligner manual content describes high-resolution optical sensing, CCD pixel resolution of 10.7 microns, high-precision mechanics, chuck-encoder resolution of 0.018 degrees, and uniform CCD illumination for this pre-aligner family
Controller
Controller integration
The atmospheric pre-aligner manual describes operation with Brooks Automation ESC Smart Controllers or EDC Dual Controllers, with controller selection dependent on the number of axes in the installed system
Facilities
Operating environment
Manual content specifies cleanroom use, operating temperature of 59 F to 89 F (15 C to 32.5 C), and 10% to 80% relative humidity, non-condensing, for atmospheric pre-aligners
Vacuum requirement
Manual content describes an external vacuum source, wafer-chuck and pin vacuum switching, recommended supply vacuum of -20 to -25 in Hg, and a vacuum fitting sized for 1/8 in OD hose unless customized
Configuration
Configured-unit rule
Controller model, firmware, wafer parameter files, calibration files, connector orientation, cable set, mounted options, and host-tool compatibility vary by the physical unit and installed wafer-handling system
Part Photos
4 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records5Tracked historical listing records
Historical median price$1,200.00Based on archived listing records
Recorded price range$1.99 - $7,900.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $41.19 to $7,540.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
EQUIPE PRI BROOKS AUTOMATION PRE-201 SP PREALIGNER ROBOT ( Contact First )
EQUIPE,PRI,BROOKS PRE-201 PRI ALIGNER / GOOD CONDITION / WORKING
Archived listings
Other Part Numbers & Aliases
PRE-201Brooks PRE-201Brooks Automation PRE-201Brooks/PRI PRE-201Brooks Automation / PRI Automation PRE-201
