Wafer Handling
SCS3000
Irvine Optical / Brooks Automation Wafer Sorter
About this part
SCS3000 identifies a legacy Irvine Optical semiconductor wafer sorter used to handle, align, and identify wafers in fabrication workflows. Brooks Automation acquired Irvine Optical in 2000, so equipment and service parts may carry Irvine Optical, Brooks Automation, or Brooks-PRI branding. Documented installations include three-SMIF configurations, notch alignment, laser-mark reading, and backside-reading upgrade paths; these details are configuration-specific rather than universal SCS3000 specifications
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Model designation | SCS3000 |
| Original manufacturer | Irvine Optical Company, LLC |
| Brand lineage | Brooks Automation acquired Irvine Optical Company effective May 5, 2000 |
| Equipment class | Semiconductor wafer sorter and wafer-handling system |
| Carrier interface | Each of two exact SCS3000 tools commissioned in 2001 was recorded with three SMIF interfaces; this is not established as the universal model configuration |
| Wafer identification functions | Notch alignment and laser-mark reading are documented for a specific Brooks-PRI SCS3000 installation |
| Backside mark reading | Front- and backside laser-mark reading was specified as an upgrade for two installed SCS3000 tools |
Manufacturer Lineage
The branding reflects corporate ownership rather than separate equivalent model families.
Configuration and Service Identification
SCS3000 is the sorter model designation, not a complete configured-unit code. Wafer format, cassette or SMIF interface, mark-reader hardware, controller assemblies, and board revisions must be verified from the individual tool data plate, serial number, and assembly labels before selecting replacement parts or asserting compatibility.
Part Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $15.79 to $126.20. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Irvine Optical Comp. LLC Board XYZT SCS3000 #605020