Flow Control
SLA6850V1EGB1A2A1
Brooks Instrument Metal-Sealed Mass Flow Controller
About this part
Brooks SLA6850V1EGB1A2A1 is a configured SLA6850 closed-loop gas mass flow controller from the Delta Class SLA6800 metal-sealed family. SLA6850 performance limits are documented at model level, while the calibrated gas, full-scale range, process connection, electrical interface, valve seat, and calibration set must be confirmed from the individual instrument’s nameplate, calibration record, or original order
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Base model | SLA6850 |
| Series | Delta Class SLA6800 Series |
| Device function | Closed-loop thermal mass flow controller for gases |
| Documented SLA6850 full-scale range | Any range from 0–3 sccm through 0–30,000 sccm nitrogen equivalent; the configured full-scale range is calibration/order-specific |
| Control range | 50:1 with an elastomeric valve seat or 33:1 with a metal valve seat; the seat fitted to this configured identifier is not established |
| Pressure differential | 5–50 psid maximum range for SLA6850; actual minimum and maximum pressure drop depend on gas and full-scale flow |
| Accuracy | ±1.0% of rate including linearity from 20% to 100% full scale; ±0.2% of full scale below 20% full scale |
| Repeatability | ±0.20% of rate |
| Settling time | Less than 800 ms to within ±2% of full scale of final value for a 0–100% step, per SEMI E17-91 |
| Temperature sensitivity | Zero: less than 0.075% of full scale per °C; span: less than ±1% of full scale shift over 10–50°C |
| Documented long-term drift | Less than 0.2% per year |
| Maximum operating pressure | 1500 psig; 150 psig (10.35 bar) maximum is recommended for optimal performance |
| Ambient temperature | Operating: 0–60°C (32–140°F); non-operating: −25–100°C (−13–212°F) |
| Maximum fluid temperature | 0–65°C (32–149°F) |
| Leak integrity | Inboard-to-outboard helium leak rate not greater than 1 × 10^-10 atm-scc/s |
| Materials | 316L vacuum-arc-remelt stainless steel, 316L stainless steel, and high-alloy ferritic stainless steel |
| Seals and valve seat | Nickel external/internal seals and standard 316L stainless-steel valve seat are documented; an elastomeric valve-seat option is also documented, so the configured seat must be verified |
| Internal wetted surface finish | 32 Ra for the SLA6800 Series |
| Documented process-connection options | 1/4-inch male VCR, CS seal, or C seal; the configured connection is not established by the available exact-code evidence |
| Documented interface options | Analog I/O using a 15-pin male D-connector or DeviceNet using a 5-pin male Micro-Connector; exact configured interface not established |
| Analog signals | 0–5 Vdc setpoint and flow signals, valve override, and calibration-select input |
| Power supply | Analog option: +15 Vdc ±5%; DeviceNet option: nominal 11–25 Vdc |
| Calibration storage | Up to 10 selectable calibration and flow-range sets; each ordered set can include gas calibration, PID settings, valve-performance data, and calibration conditions |
What Does SLA6850V1EGB1A2A1 Mean?
The published model designation establishes the instrument family and controller function. The complete configured suffix requires the instrument record or manufacturer decoding software.
| Segment | Field | Interpretation |
|---|---|---|
| SLA6850 | Brooks model | Delta Class SLA6800 Series metal-sealed gas mass flow controller; documented model range extends from 3 to 30,000 sccm nitrogen equivalent. |
| V1EGB1A2A1 | Configured option suffix | A Brooks Product Data Code suffix representing device options. A complete public selection table for this legacy suffix was not located; confirm its fields from the nameplate, original order, or Brooks BEST device information. |
Configured Gas and Range
Gas and flow range are calibration attributes rather than one universal specification for every unit carrying this code.
Legacy Status and Replacement
Brooks includes SLA6850 in its obsolete mass flow controller and meter list. A replacement must be selected against the unit’s calibrated gas and range, pressure conditions, process connection, valve configuration, electrical interface, and dimensional requirements; no universal drop-in successor should be inferred from the base model alone.
Documentation Downloads
Local PDF copiesPart Photos
3 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,995.00 to $1,995.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument SLA6850V1EGB1A2A1 Mass Flow Controller