Flow Control

SLA7840AZ635

Brooks Metal-Sealed Remote-Transducer Pressure/Flow Controller

About this part

Brooks SLA7840AZ635 is a configured SLA7840 high-purity, all-metal-sealed digital remote-transducer pressure/flow controller. It regulates gas pressure from an external transducer signal while measuring mass flow through an integral thermal sensor. The SLA7840A prefix identifies the analog-I/O version. Published SLA7840 documentation does not define the remaining Z635 suffix; gas, full-scale flow, process connection, valve arrangement and calibration remain configuration-specific

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Instrument SLA7800 Series
Part numberSLA7840AZ635
Product familySLA7840 Series
Device typeController
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
ManufacturerBrooks Instrument
SeriesSLA7800 Series
Base modelSLA7840
Device typeHigh-purity, metal-sealed digital remote-transducer pressure/flow controller
Function
Primary functionControls gas pressure using an external pressure-transducer signal while measuring mass flow through the integral thermal sensor
Controls
I/O versionAnalog I/O; the documented SLA7840A prefix identifies this interface version
Electrical connector15-pin male D-connector for the SLA7840A analog-I/O version
Analog setpoint and flow signals0–5 VDC
Remote sensor input0–10 VDC maximum; suitable for an externally supplied pressure transducer
Mode selectionAnalog mode-select input supports pressure-control mode or flow-control mode
Electrical
Power supply+15 VDC, ±5% for the analog-I/O version
Power consumption with valve3.6 W typical; 4.0 W maximum for analog I/O
Flow
Available full-scale rangesAny SLA7840 range from 0–3 sccm through 0–30,000 sccm nitrogen-equivalent; the AZ635 full-scale setting is not established by published documentation
Control range33:1 published SLA7840 specification
Accuracy±1.0% of rate including linearity from 20% to 100% full scale; ±0.2% of full scale below 20% full scale
Repeatability±0.20% of rate
Settling timeLess than 1 second to within ±2% full scale for a 0–100% step under the documented test standard
Pressure
Pressure control range20:1
Maximum operating pressure500 psig in the model-specific SLA7840 data sheet and installation manual
Typical settling timeLess than 1 second for a 20–100% setpoint step with no more than 2% overshoot; actual response depends strongly on system design
Calibration
Stored calibration data setsUp to 10 selectable gas calibrations and flow ranges
Mechanical
Platform width1-1/8 inch
Valve technologyHigh-performance co-planar control valve
Available process connections1/4-inch male VCR standard; C Seal, CS Seal and W Seal documented as options. The AZ635 connection is not established
Materials
Wetted materials316L vacuum-arc-remelt stainless steel, 316L stainless steel and high-alloy ferritic stainless steel
Metal seals and valve seatNickel internal/external seals; standard 316L stainless-steel valve seat
Wetted surface finish32 µin Ra maximum
Ratings
Leak integrity1 × 10^-10 atm·scc/s helium maximum, inboard to outboard
Environment
Operating ambient temperature0–60 °C (32–140 °F)
Fluid temperature0–65 °C (32–149 °F)

What Does SLA7840AZ635 Mean?

Only the base model and analog-interface letter are defined by available Brooks documentation.

SegmentFieldInterpretation
SLA7840Base modelHigh-purity, metal-sealed digital remote-transducer pressure/flow controller.
AI/O versionAnalog I/O with a 15-pin D-connector, 0–5 VDC setpoint and flow signals, and +15 VDC power.
Z635Remaining suffixNot defined in published SLA7840 documentation. Do not assert a gas, range, fitting, valve or special option from these characters without a nameplate, calibration sheet or Brooks order record.

Remote-Transducer Operation

A user-supplied pressure transducer monitors the controlled vessel or line. The SLA7840 compares that pressure signal with the setpoint and adjusts its integral solenoid valve to stabilize pressure. Its integral thermal mass-flow sensor simultaneously produces a signal proportional to flow through the valve.

Documentation Downloads

Local PDF copies

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$175.00Based on archived listing records
Recorded price range$175.00 - $175.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $175.00 to $175.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Delta Class Smart Mass Flow Controller MFC Gas AR 3 SLPM SLA7840AZ635

Archived listings

Other Part Numbers & Aliases

SLA7840AZ635Brooks SLA7840AZ635