Brooks Automation SMC/MMS Semiconductor Equipment Controller Family
About this part
Brooks Automation TEC-3000 is a semiconductor equipment-control family offered in single-module controller (SMC) and multi-module system (MMS) architectures. The SMC provides single-module equipment control with extensive I/O and Ethernet communications. The MMS combines supervisory, transport, and process controllers in one package. TEC-3000 alone does not define the chassis revision, power input, board population, connectors, operating-system release, software load, or host-tool configuration
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryBoards and Controllers
Specifications
Identification
Manufacturer
Brooks Automation, Inc
Model family
TEC-3000
Application
Product role
Equipment-control hardware for semiconductor tool automation
Architecture
Documented configurations
Single module controller (SMC) and multi-module system (MMS)
SMC function
Single-module equipment control
MMS function
Integrates supervisory, transport, and process controllers into one package
Interfaces
SMC connectivity
Extensive I/O and Ethernet communications
Equipment-controller interfaces
The documented EC architecture supported 18 COM ports and DeviceNet; installed interfaces depend on the chassis and board configuration
Platform
Documented operating environment
Windows NT platform; installed operating-system release and application software are configuration-specific
Networking
MMS controller interconnect
Internal Ethernet using TCP/IP in the documented architecture
TEC-3000 Controller Architectures
Configuration
Meaning
Documented role
Exact-unit boundary
SMC
Single Module Controller
Controls one equipment module with extensive I/O and Ethernet communications
Does not define an S2 revision, power input, connector population, or software image
MMS
Multi-Module System
Combines supervisory, transport, and process controllers in one package
Board count, controller revisions, software, and tool integration remain configuration-specific
Configuration and Replacement Notes
Base identifierTEC-3000 identifies the controller family, not one fixed chassis configuration.
Replacement matchingMatch the complete SMC or MMS configuration, revision markings, power label, installed boards, connector arrangement, software image, and tool application.
Power inputVerify the chassis label. The observed 24 VDC, 2 A value applies only to an identified SMC-S2 unit.
TEC-3000 PROTreat TEC-3000 PRO/TEC3000PRO as a separately observed marking unless manufacturer or physical-label evidence establishes its relationship to the base family.
Part Photos
5 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$1,350.00Based on archived listing records
Recorded price range$1,250.00 - $1,450.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,270.00 to $1,430.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Automation TEC-3000 Controller SMC-S2, 24VDC/2A - USED
