Boards and Controllers

TEC3000PRO

Brooks Automation TEC-3000 PRO Semiconductor Equipment Controller

About this part

TEC-3000 PRO is a Brooks Automation controller in the legacy TEC-3000 semiconductor tool-automation family. Brooks documented TEC-3000 in single-module and multi-module forms. The exact chassis architecture, installed boards, software role, I/O complement, and electrical requirements of TEC3000PRO require unit-label or manufacturer-record confirmation

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (5)Listing history

Brooks Automation TEC-3000 TEC3000PRO Semiconductor equipment controller auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Automation TEC-3000

Part numberTEC3000PRO

Product familyConfiguration-specific

Device typeController

Configuration statusConfiguration varies

Application classSemiconductor/high-purity gas delivery

CategoryBoards and Controllers

Specifications

Identification

Manufacturer	Brooks Automation, Inc
Model marking	TEC-3000 PRO

Product

Product class

Semiconductor tool/equipment controller

TEC-3000 Family

Documented architectures	Single Module Controller (SMC) and Multi-Module System (MMS)
SMC function	Single-module equipment control with extensive I/O and Ethernet communications
MMS function	Integration of supervisory, transport, and process controllers in one package

Configuration

Exact-unit boundary

TEC3000PRO does not establish the SMC/MMS architecture, installed controller boards, software, I/O modules, or input-power configuration

TEC-3000 Family Architecture

Brooks documented two TEC-3000 architecture classes. The TEC3000PRO identifier does not establish which architecture is present in the archived unit.

Configuration	Documented function	Exact-unit applicability
SMC — Single Module Controller	Single-module equipment control with extensive I/O and Ethernet communications	Not established for TEC3000PRO
MMS — Multi-Module System	One package integrating supervisory, transport, and process controllers	Not established for TEC3000PRO

Configuration Identification

Replacement or compatibility decisions require the unit-specific manufacturer label and installed-board inventory.

Displayed identityBrooks Automation TEC-3000 PRO

Identifier statusTEC3000PRO is supported as the exact archive/listing identifier but is not verified as a Brooks ordering code

Required matching evidenceManufacturer model and part-number label, chassis architecture, installed board numbers, software role, I/O modules, and electrical rating

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$1,250.00Based on archived listing records

Recorded price range$1,250.00 - $1,250.00Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $1,250.00 to $1,250.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

AS IS POWERS ON Brooks Automation TEC-3000 PRO Controller TEC3000PRO

Archived listings

Other Part Numbers & Aliases

TEC3000PROTEC-3000 PRO