Flow Control
5850S
Brooks Instrument Smart-Series Digital Mass Flow Controller
About this part
Brooks Instrument 5850S is a configured 5850S mass flow controller for semiconductor/high-purity gas delivery.
Unit-specific configuration
Observed configuration
Historical listing records identify this part as H2 at 500 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part number5850S
Product family5850S
Device typeMass Flow Controller
Observed gasH2
Observed full-scale range500 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Smart-Series digital thermal mass flow controller |
| Series family | 5800S Smart Mass Flow Series |
| Official covered controller models | 5850S, 5851S, and 5853S |
| Related meter models | 5860S, 5861S, 5863S, and 5864S depending on document and interface option |
Configuration
| Configured-unit rule | Gas, full-scale range, fitting, valve state, connector, and seal package vary by configured model code |
Flow
| 5850S/BA flow range | 0.003 to 0.008 ln/min nitrogen equivalent |
| 5850S/BC flow range | 0.008 to 30 ln/min nitrogen equivalent |
| High-pressure 5850S range context | At 300 bar operating pressure, Brooks data-sheet context lists 5850S full-scale limits from 100 mln/min to 10 ln/min nitrogen equivalent |
Performance
| Accuracy | +/-0.7% of rate and +/-0.2% full scale at calibration conditions; optional +/-0.5% of rate and +/-0.1% full scale |
| Repeatability | +/-0.25% of rate |
| Rangeability | 50:1 within specified accuracy |
| Controllability | 100:1 total operating range |
| Stability | Less than +/-0.5% of rate per year |
| Controller settling time | Standard 1 second settling time, with response up to 0.2 seconds possible; 5853S is specified separately |
Pressure
| Pressure rating | 5850S / 5860S are listed at 100 bar, with 300 bar high-pressure version optional |
Environmental
| Temperature range | Ambient and process gas: 0 C to 70 C |
Materials
| Wetted materials | Stainless steel wetted parts with Viton, Buna-N, PTFE/Kalrez, Kalrez, EPDM, or metal valve-seat options depending on configured code |
Mechanical
| Process connection options | Documented 5850S/5860S/5851S/5861S options include 9/16-18 UNF, 1/4 inch, 1/8 inch, and 6 mm tube compression fittings, 1/4 inch VCR, 1/4 inch VCO, 1/4 inch NPT, 10 mm tube compression, and 1/4 inch BSP |
| Electrical connector | 15-pin D-type connector with gold-plated contacts |
Electrical
| Setpoint input | 0-5 VDC or 1-5 VDC voltage input, or 0-20 mA / 4-20 mA current input depending on configuration |
| Analog output | 0-5 VDC, 1-5 VDC, 0-20 mA, or 4-20 mA flow output adjustable by software depending on configuration |
| Controller power | +15 to +28 VDC or +/-15 VDC depending on configuration; +24 VDC required for normally open valves and 5851S use |
| 5850S controller current draw | At +24 VDC, 140 mA typical for controllers or 180 mA for Profibus; at +15 VDC, 185 mA |
Controls
| Digital communication | RS-232 or RS-485 communication with selectable baud rates from 1200 to 38K4; Profibus-DP up to 12 Mbit/sec when configured |
| Digital data availability | Flow, setpoint, flow totalizer, ambient temperature, operational settings, calibration data, controller settings, and PID settings are available through Smart-Series digital communication |
| Calibration storage | Storage of up to 10 calibration curves |
| Diagnostics | Self-diagnostics can activate an alarm output and expose failure details through digital communication |
| Valve options | Model-code options include meter-only, normally closed, normally open for 5850 only, and high-pressure normally closed 5850 configurations |
Applications
| Application domain | Semiconductor, laboratory, analytical, and process gas handling |
Observed variants
| Stored auction gas/range combinations | H2 500 SCCM (31), AIR (12), AIR 500 SCCM (3), CO2 (3), AIR 20 SLM (2), N2 1000 SCCM (1), 50 SCCM (1), 1 1 SLM (1) |
Documentation Downloads
Local PDF copiesPart Photos
35 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records76Tracked historical listing records
Historical median price$300.00Based on archived listing records
Recorded price range$28.00 - $1,099.00Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $99.00 to $694.00. Based on 76 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Smart Mass Flow FS Flow Rate Model 5850S H2 500 SCCM
- Brooks Instrument 4800 Series Mass Flow Meter AIR CO2 5850S 500 SCCM
- Brooks Instrument 4800 Series Mass w Meter AIR CO2 5850S 500 SCCM
- Brooks Profi Bus 5850S Smart Mass Flow
Archived listings
Other Part Numbers & Aliases
5850SBrooks 5850SBrooks Instrument 5850SBrooks Smart Mass Flow 5850S5800S5800-S5850S/BA5850S/BC5850S MFC5850S Smart Mass Flow ControllerBrooks Profibus 5850S