Brooks Instrument Metal-Sealed Thermal Mass Flow Controller
About this part
GF120SLC is an observed short identifier for a Brooks Instrument GF120-series metal-sealed thermal mass flow controller. The short identifier does not establish the complete configured product code, so gas, full-scale range, fitting, connector, valve, communication interface, and Safe Delivery System status must be confirmed from the complete unit label or Brooks configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Manufacturer
Brooks Instrument
Product family
GF100 Series metal-sealed high-purity and ultra-high-purity thermal mass flow controllers and meters for gases
GF120 code context
The current Brooks product-description table defines GF120 as the high-performance, non-PTI package/finish option with a 3 sccm to 55 slpm N2-equivalent family envelope, 700 ms normally closed-valve response context, and 5 microinch Ra finish context
Applications
Application domain
Semiconductor, MOCVD, implant, etch, thin-film deposition, and other high-purity gas-flow applications at family level
Flow
Configured flow range
Configuration-specific; the complete gas/range code or unit label is required
Performance
Family accuracy context
Applicable analog and DeviceNet GF120-family configurations are documented at ±1% of set point from above 35% through 100% full scale and ±0.35% full scale from 2% through 35%, based on factory N2 calibration
Family repeatability context
Applicable configurations are documented at ±0.15% of set point from 5% through 100% and ±0.015% full scale from 2% through 5%
Settling-time boundary
The current table lists 700 ms for standard GF120 normally closed-valve configurations and less than 3 seconds for GF120XSL/GF120XSD SDS configurations; GF120SLC alone does not establish which context applies
Materials
Wetted-path context
The GF100 Series uses an all-metal, SEMI F20 HP-compliant high-purity flow path; exact wetted components and optional valve materials remain configuration-dependent
Controls
Communication interface
Configuration-specific; analog/RS-485, DeviceNet, and EtherCAT occur within the documented family, but GF120SLC does not identify the installed interface
Valve
Valve configuration
Not established by the short identifier; standard GF120 configurations can be normally closed, normally open, or meter-only, while documented SDS configurations require a normally closed valve
What Does GF120SLC Mean?
Only the manufacturer-supported segments can be decoded safely. GF120SLC is not a complete valid sequence under the current Brooks product-description table and must not be silently normalized.
Segment
Field
Interpretation
GF
Base model code
Brooks high-purity/ultra-high-purity digital mass flow controller family.
120
Package / finish specification
Current code for the high-performance, non-PTI GF120 package.
S
Configurability position
Unsupported value in the current table; this position accepts C for MultiFlo-capable or X for a fixed gas/range special-application configuration.
LC
Unresolved remainder
Cannot be aligned safely after the unsupported S value. For comparison, the current low-flow SDS, normally closed sequence is X + SL + C, producing a complete prefix of GF120XSLC. This comparison does not prove that GF120SLC is an SDS configuration.
