Flow Control

GF125C-205385

Brooks Instrument GF125CXXC Mass Flow Controller

About this part

GF125C-205385 is a configured Brooks Instrument GF125CXXC metal-sealed thermal mass flow controller in the GF100/GF120/GF125 high-purity thermal mass flow controller platform. Stored auction evidence and exact listing records show several observed contexts for this configured part, including N2 7200 SCCM title wording, Ar 6000 SCCM title wording, and an exact GF125C-205385 / GF125CXXC-SH467.2L-CXVODX-1121AX-000 listing with Ar 4000 SCCM, DeviceNet, surface-mount fitting, and AMAT 0190-49896-05 context. These listing observations should not be treated as interchangeable calibration specifications; verify the physical unit label and calibration paperwork before reuse

Unit-specific configuration
Observed configuration

Historical listing records identify this part as N2 at 7200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberGF125C-205385
Product familyGF125 Series
Device typeMass Flow Controller
Observed gasN2
Observed full-scale range7200 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeMetal-sealed thermal mass flow controller
Series familyGF125 within the Brooks GF100 / GF120 / GF125 Series
Configured Brooks modelGF125C-205385, observed in listing evidence as a GF125CXXC configured unit
Observed configured model stringGF125CXXC-SH467.2L-CXVODX-1121AX-000 appears in exact listing evidence for an Ar 4000 SCCM unit
Observed OEM part numberAMAT / Applied Materials 0190-49896-05 appears in exact listing evidence
Configuration
Configured-unit ruleGas, full-scale range, communication interface, valve state, fitting package, and process options vary by configured model code and calibration
Applications
Application domainSemiconductor, MOCVD, thin-film, and high-purity gas flow control
Performance
Flow accuracy+/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for the GF100/GF120/GF125 family
Repeatability and reproducibility5-100% equals +/-0.15% of set point; 2-5% equals +/-0.015% of full scale
Settling timeNormally closed valve response ranges from 300 ms to less than 700 ms across documented GF100/GF125 flow bins
Control range2-100% for normally closed valve configurations and 3-100% for normally open valve configurations where applicable
Ratings
Operating temperature10 to 50 C series-level operating temperature range
Maximum operating pressure500 psia maximum for GF100/GF125 in the official analog/DeviceNet data sheet
Proof / design / burst pressure700 psia proof pressure, 800 psia design pressure, and 3000 psia burst pressure for GF100/GF125 in the official analog/DeviceNet data sheet
External leak integrity1 x 10^-10 atm cc/sec He
Materials
Wetted path standardSEMI F20 HP compliant wetted materials
Wetted materials316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional Zero Leak-by valve configurations
Surface finish10 microinch Ra for GF100/GF125 standard table entries; 5 microinch Ra applies to GF120 SDS entries
Controls
Communication interfacesAnalog/RS-485, DeviceNet, or EtherCAT depending on configuration
Observed interfaceDeviceNet in exact listing evidence
DeviceNet connectorDeviceNet via 5-pin M12 connector on applicable DeviceNet configurations
Diagnostic/service portRS-485 diagnostic/service port is listed for GF100/GF120/GF125 models
Flow
Gas/range programmabilityMultiFlo gas and range programmability is supported on applicable GF100/GF120/GF125 configurations
Observed gas/range contextsStored and listing evidence includes N2 7200 SCCM title wording, Ar 6000 SCCM title wording, and Ar 4000 SCCM exact listing details; one listing snippet conflicts between a 7200 SCCM title and 6000 SCCM item-specific range wording
Mechanical
Observed fittingSurface Mount in exact listing evidence
Compliance
Observed markingCE Marked in exact listing evidence for the GF125CXXC-SH467.2L-CXVODX-1121AX-000 example

Documentation Downloads

Local PDF copies

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records4Tracked historical listing records
Historical median price$1,174.57Based on archived listing records
Recorded price range$85.00 - $1,205.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $403.56 to $1,204.35. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument GF125C-205385 Mass Flow Controller MFC 6000 SCCM Ar New Spare
  • Brooks GF125CXXC Mass Flow Controller GF125C-205385 N2, 7200 SCCM
  • Brooks Instrument GF125C-205385 Mass Flow Controller MFC 7200 SCCM N2 New Spare
  • Brooks Instrument GF125C-205385 Mass Flow Controller MFC 7200 SCCM N2 New

Archived listings

Other Part Numbers & Aliases

GF125C-205385Brooks GF125C-205385Brooks Instrument GF125C-205385GF125C-205385 MFCGF125C-205385 Mass Flow ControllerGF125C-205385 7200 SCCM N2GF125C-205385 6000 SCCM ArGF125C-205385 4000 SCCM Ar0190-49896-05AMAT 0190-49896-05Applied Materials 0190-49896-05GF125CXXC-SH467.2L-CXVODX-1121AX-000