Flow Control
GF125CXXC
Brooks Instrument GF100/GF120/GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125CXXC is a configured Brooks Instrument GF100/GF120/GF125-family metal-sealed thermal mass flow controller or meter identifier. Brooks documentation places GF125 in the GF100 metal-sealed MFC/MFM family; the CXXC/configured suffix context should be interpreted as configuration-specific rather than as one universal gas/range specification. Stored Sonisys auction evidence shows many GF125CXXC gas/range variants, so the nameplate remains the authority for a specific unit
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 860 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberGF125CXXC
Product familyGF100 Series
Device typeMass Flow Controller
Observed gasN2
Observed full-scale range860 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Metal-sealed thermal mass flow controller or meter |
| Series family | Brooks GF100 metal-sealed mass flow controller and meter family, including GF100, GF101, GF120, GF120XSD, GF120XSL, GF121, GF125, and GF126 models |
| GF125 role | GF125CXXC is treated as a GF125/GF100-family configured part identifier; official documentation covers the GF100/GF120/GF125 family rather than every customer suffix |
Configuration
| Configured-unit rule | Gas, full-scale flow range, valve type, fitting package, electrical connector, communication protocol, display, and OEM/customer suffix options vary by full configured model code |
Applications
| Application domain | Semiconductor, MOCVD, thin-film, and other gas-flow control applications requiring a high-purity all-metal flow path |
Performance
| Flow accuracy context | GF100/GF120/GF125 Analog and DeviceNet data-sheet table lists +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration |
| Repeatability and reproducibility | GF100/GF120/GF125 table lists +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5% |
| Settling time context | Normally closed valve settling-time bins are listed from 300 ms to less than 700 ms across the documented GF100/GF120/GF125 flow bins |
| Pressure transient insensitivity | GF100-family documentation identifies pressure transient insensitivity as a feature that reduces upstream-pressure crosstalk sensitivity; PTI availability is configuration dependent |
Flow
| Series-level flow context | The GF100/GF120/GF125 data sheet lists model-dependent ranges spanning low sccm service through high-flow slm service; use the nameplate/configuration record for the exact GF125C gas and range |
| Gas/range programmability | MultiFlo gas and range configurability is documented for supported GF100-family devices and allows reconfiguration without removing the device from the gas line |
Controls
| Communication interfaces | Brooks documentation provides Analog/RS485, DeviceNet, RS485 L-Protocol, and EtherCAT documentation for the GF100 family; actual interface depends on configuration |
Electrical
| Analog connector context | The installation manual documents GF100-family Analog/RS485 configurations using a 9-pin D connector with 0-5 Vdc output and setpoint pins plus RS485 DX+ and DX- pins |
| DeviceNet power context | The GF100/GF120/GF125 table lists DeviceNet power consumption up to 545 mA at +11-25 Vdc and 250 mA at 24 Vdc under typical operating conditions |
| Analog power context | The GF100/GF120/GF125 table lists RS485/Analog power consumption as 6 W maximum at +/-15 Vdc (+/-10%) or +24 Vdc (+/-10%) |
Materials
| Wetted materials | GF100/GF120/GF125 documentation lists SEMI F20 HP compliant wetted materials including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional Zero Leak-by Valve configurations |
| Sensor platform | Brooks identifies a corrosion-resistant Hastelloy sensor as a GF100-family feature |
Leak integrity
| External leak integrity | GF100/GF120/GF125 table lists external leak integrity of 1 x 10^-10 atm cc/sec helium |
Environmental
| Operating temperature | GF100/GF120/GF125 data-sheet table lists 10 C to 50 C operating temperature range |
Mechanical
| Valve options | Documented mechanical configurations include normally closed, normally open, and meter/no-valve variants depending on model and configuration |
Display and diagnostics
| Diagnostics | The family includes an independent diagnostic/service port; documentation identifies RS485 service access and top-mount LCD/status features on applicable configurations |
Compliance
| Compliance context | GF100/GF120/GF125 table references CE EMC testing, RoHS, REACH, and environmental compliance context for documented configurations |
Observed variants
| Stored auction gas/range combinations | N2 860 SCCM (22), N2 2600 SCCM (21), N2 (18), N2 7200 SCCM (18), N2 280 SCCM (14), 2000 SCCM (13), N2 15000 SCCM (12), N2 30000 SCCM (11) |
Documentation Downloads
Local PDF copies
Brooks GF100 Series Analog and DeviceNet Data Sheet
Local PDF download
PDF4.2 MB
Brooks GF100 Series EtherCAT Data Sheet
Local PDF download
PDF1.2 MB
Brooks GF100 Series Installation and Operation Manual
Local PDF download
PDF6.1 MB
Brooks GF100 Series DeviceNet Manual
Local PDF download
PDF1.4 MB
Brooks GF100 Series RS485 L-Protocol Manual
Local PDF download
PDF632 KB
Brooks GF100 Series EtherCAT Manual
Local PDF download
PDF2.8 MB
Brooks MultiFlo Configurator Quick Start Guide
Local PDF download
PDF3.2 MB
Part Photos
656 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records523Tracked historical listing records
Historical median price$436.11Based on archived listing records
Recorded price range$1.00 - $3,811.24Low to high recorded listing price
Local documents7PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $99.99 to $1,710.04. Based on 523 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument Mass Flow Controller GF125CXXC SiH4 He NH3 O2 NF3 N2 Ar
- Brooks Instrument GF125CXXC Mass Flow Controller N2 Ar N2O O2 NH3 NF3
- Brooks Instrument GF125CXXC VCR TYPE Mass Flow Controller N2 N2 Ar N2
- Brooks Instrument GF125CXXC Mass Flow Controller
- Brooks Instrument MFC GF125CXXC NH3_4000 N2_20000(2PCS) N2O_20000 He_10000SCCM
- Brooks Instrument GF125CXXC Mass Flow Controller MFC NF3 500SCCM .5SLM
Archived listings
Other Part Numbers & Aliases
GF125CXXCGF125CGF125GF125C-106033GF125C-884613GF125-SH44GF Series MFC