Flow Control
GF125C
Brooks Instrument GF125 Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF125C is a configured Brooks Instrument GF100/GF120/GF125-family metal-sealed thermal mass flow controller or meter for semiconductor, MOCVD, thin-film, and high-purity gas delivery. Brooks documentation places GF125 in the GF100 metal-sealed MFC/MFM family; exact gas, full-scale range, valve state, fitting, communication interface, and customer/OEM suffix options remain configuration-specific and should be verified from the unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberGF125C
Product familyGF100 Series
Device typeMass Flow Controller
Observed gasN2
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Metal-sealed thermal mass flow controller or meter |
| Series family | Brooks GF100 metal-sealed mass flow controller and meter family, including GF100, GF101, GF120, GF120XSD, GF120XSL, GF121, GF125, and GF126 models |
| GF125 role | GF125 is documented inside the GF100/GF120/GF125 specification tables and product-description-code tables |
Configuration
| Configured-unit rule | Gas, full-scale flow range, valve type, fitting package, electrical connector, communication protocol, display, and OEM/customer suffix options vary by full configured model code |
Applications
| Application domain | Semiconductor, MOCVD, thin-film, and other gas-flow control applications requiring a high-purity all-metal flow path |
Performance
| Flow accuracy context | GF100/GF120/GF125 Analog and DeviceNet data-sheet table lists +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration |
| Repeatability and reproducibility | GF100/GF120/GF125 table lists +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5% |
| Settling time context | Normally closed valve settling-time bins are listed from 300 ms to less than 700 ms across the documented GF100/GF120/GF125 flow bins |
| Pressure transient insensitivity | GF100-family documentation identifies pressure transient insensitivity as a feature that reduces upstream-pressure crosstalk sensitivity; PTI availability is configuration dependent |
Flow
| Series-level flow context | The GF100/GF120/GF125 data sheet lists model-dependent ranges spanning low sccm service through high-flow slm service; use the nameplate/configuration record for the exact GF125C gas and range |
| Gas/range programmability | MultiFlo gas and range configurability is documented for supported GF100-family devices and allows reconfiguration without removing the device from the gas line |
Controls
| Communication interfaces | Brooks documentation provides Analog/RS485, DeviceNet, RS485 L-Protocol, and EtherCAT documentation for the GF100 family; actual interface depends on configuration |
Electrical
| Analog connector context | The installation manual documents GF100-family Analog/RS485 configurations using a 9-pin D connector with 0-5 Vdc output and setpoint pins plus RS485 DX+ and DX- pins |
| DeviceNet power context | The GF100/GF120/GF125 table lists DeviceNet power consumption up to 545 mA at +11-25 Vdc and 250 mA at 24 Vdc under typical operating conditions |
| Analog power context | The GF100/GF120/GF125 table lists RS485/Analog power consumption as 6 W maximum at +/-15 Vdc (+/-10%) or +24 Vdc (+/-10%) |
Materials
| Wetted materials | GF100/GF120/GF125 documentation lists SEMI F20 HP compliant wetted materials including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional Zero Leak-by Valve configurations |
| Sensor platform | Brooks identifies a corrosion-resistant Hastelloy sensor as a GF100-family feature |
Leak integrity
| External leak integrity | GF100/GF120/GF125 table lists external leak integrity of 1 x 10^-10 atm cc/sec helium |
Environmental
| Operating temperature | GF100/GF120/GF125 data-sheet table lists 10 C to 50 C operating temperature range |
Mechanical
| Valve options | Documented mechanical configurations include normally closed, normally open, and meter/no-valve variants depending on model and configuration |
Display and diagnostics
| Diagnostics | The family includes an independent diagnostic/service port; documentation identifies RS485 service access and top-mount LCD/status features on applicable configurations |
Compliance
| Compliance context | GF100/GF120/GF125 table references CE EMC testing, RoHS, REACH, and environmental compliance context for documented configurations |
Observed variants
| Stored auction gas/range combinations | N2 (14), N2 7200 SCCM (13), N2 860 SCCM (10), N2 280 SCCM (10), N2 30000 SCCM (9), N2 2600 SCCM (7), 2000 SCCM (7), N2 10 SCCM (7) |
Documentation Downloads
Local PDF copies
Brooks GF100 Series Analog and DeviceNet Data Sheet
Local PDF download
PDF4.2 MB
Brooks GF100 Series EtherCAT Data Sheet
Local PDF download
PDF1.2 MB
Brooks GF100 Series Installation and Operation Manual
Local PDF download
PDF6.1 MB
Brooks GF100 Series DeviceNet Manual
Local PDF download
PDF1.4 MB
Brooks GF100 Series RS485 L-Protocol Manual
Local PDF download
PDF632 KB
Brooks GF100 Series EtherCAT Manual
Local PDF download
PDF2.8 MB
Brooks MultiFlo Configurator Quick Start Guide
Local PDF download
PDF3.2 MB
Part Photos
428 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records363Tracked historical listing records
Historical median price$717.00Based on archived listing records
Recorded price range$51.17 - $3,811.24Low to high recorded listing price
Local documents7PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $99.99 to $1,761.24. Based on 363 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF125C Mass Flow Controller MFC AMAT Reseller Lot of 11 Spare
- Brooks GF125C-902550 Thermal Mass Flow,N2 30sccm,Lam 0190-32363-02,Unuse,US+9383
- 6625 BROOKS MFC GF SERIES, GF125C-896798 GF125CXXC
- Brooks GF125C MFC 10SLM NH3 VCR Tested Working
- BROOKS GF125CXXC MFC MASS FLOW CONTROLLER GF125C-200849 AR 50 SCCM
- BROOKS GF125C-855741 GF125CXXC New
Archived listings
Other Part Numbers & Aliases
GF125CGF125C SeriesGF125C-902550GF125C-896798GF125C MFC