Flow Control
GF120XXM
Brooks Instrument Metal-Sealed Thermal Mass Flow Controller
About this part
GF120XXM is a Brooks Instrument GF120-series metal-sealed digital thermal mass flow controller built on the GF100 Series high-purity platform. GF120 is the special-application branch of the family, which includes Safe Delivery System (SDS) and high-temperature variants, so the exact gas, flow range, valve state, fitting, surface finish, and communication interface of a configured GF120XXM unit are set by its full model code and should be confirmed from the device label or build sheet. The archived unit was offered new and configured for boron trifluoride (BF3) service at 200 sccm
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Part number | GF120XXM |
| Series | GF100 Series, GF120 metal-sealed configuration |
| Device type | Metal-sealed digital thermal mass flow controller |
| Application domain | High-purity and ultra-high-purity semiconductor gas flow, including etch, MOCVD, implant, and thin-film processes |
| Family flow-range envelope | The current GF100 Series analog/DeviceNet data sheet lists 3 sccm through 55 slpm N2-equivalent across GF100/GF120/GF125 configurations; the usable range of a specific unit is set by its configured code |
| Gas and range configurability (family) | MultiFlo gas and range configuration is supported on applicable configurable models; X-coded and special-application builds can require a specific gas and range and must not be assumed universally re-rangeable |
| Accuracy (family) | +/-1% of set point from 35-100% of full scale and +/-0.35% of full scale over 2-35%, based on factory N2 calibration, for the applicable analog/DeviceNet configurations |
| Repeatability (family) | +/-0.15% of set point from 5-100% and +/-0.015% of full scale from 2-5% |
| Wetted flow path (family) | SEMI F20 HP-compliant, all-metal high-purity flow path; exact wetted materials and valve components vary by configuration |
| Communication options (family) | RS-485/analog, DeviceNet, and EtherCAT are documented family interfaces; the installed interface is set by the configured code and connector |
GF120 configuration boundaries
GF120 is the special-application branch of the GF100 metal-sealed family. The following boundaries prevent family features from being read as fixed properties of this configured code.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $299.00 to $299.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instruments GF120XXM BF3 200SCCM Mass Flow Controller NEW