Flow Control
GP200-200367
Brooks Instrument GP200 Series Pressure-Based Mass Flow Controller
About this part
Brooks Instrument GP200-200367 identifies a GP200 Series metal-sealed, digital, ultra-high-purity pressure-based mass flow controller for semiconductor gas delivery. GP200 devices combine true differential-pressure measurement, a downstream control valve, and an embedded MultiFlo gas model. The short GP200-200367 identifier does not disclose the configured gas, full-scale range, valve option, fitting, communications interface, or pressure configuration; exact replacement requires the unit’s full Brooks model code or side-can label
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
ManufacturerBrooks Instrument GP200 Series
Part numberGP200-200367
Product familyConfiguration-specific
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Manufacturer | Brooks Instrument |
| Part identifier | GP200-200367 |
| Product family | GP200 Series |
GP200 Series family
| Product description | Metal-sealed, digital, ultra-high-purity pressure-based mass flow controller for gases |
| Measuring architecture | True differential-pressure sensor with downstream control-valve architecture |
| Applications | Semiconductor etch, chemical vapor deposition, and other ultra-high-purity gas-flow-control processes |
GP200 Series performance — configuration-dependent
| Published full-scale flow span | 3 to 50,000 sccm, nitrogen-equivalent; the standard ordering table lists nine CT bin codes from 10 to 45,000 sccm, and exact gas-specific sizing requires Brooks bin data or the Configurator |
| Process-gas flow accuracy | Zero-leak valve: <±1% of setpoint from 5–100% full scale and <±0.05% full scale from 0.5–5%; metal-seat valve: <±1% of setpoint from 5–100% full scale and <±0.05% full scale from 2–5%. Analog control adds <±0.05% full scale |
| Control range | 0.5–100% full scale with zero-leak valve; 2–100% full scale with metal-seat valve |
| Repeatability and reproducibility | ±0.15% of setpoint from 5–100% full scale; ±0.015% full scale over the valve-dependent low-flow control range |
| Matched transient response | 280 ±20 ms for ascending or descending non-zero setpoints; faster response is available by customer special request |
| Supply-pressure disturbance response | <±1% of setpoint during inlet-pressure spikes up to 40 psi/s |
GP200 Series ratings — configuration-dependent
| Operating temperature | 10–60°C; re-zeroing at ambient operating temperature is required |
| Inlet-pressure configurations | Application-configurable low-pressure bins below 15 psia, or published ranges of approximately 15–30, 25–40, 35–50, and 45–60 psia |
| Outlet-pressure capability | Vacuum to atmosphere; selected applications support positive downstream pressure up to 1200 Torr |
| Pressure ratings | Proof pressure: 100 psia for CT-bin devices, reduced to 70 psia for helium or helium mixtures, and 45 psia for LP-bin devices; design pressure: 150 psia; burst pressure: 1,000 psia |
GP200 Series mechanical options
| Wetted materials | 316L, 316/316L stainless steel, 304 stainless steel, Hastelloy C-22, KM-45, and PCTFE |
| Wetted-surface finish | 5 µin Ra average |
| Fitting choices | 92 mm C-Seal, 92 mm W-Seal, 92 mm C-Seal with poke-yoke, or 124 mm 1/4-inch male VCR |
GP200 Series electrical options
| Interfaces | DeviceNet, EtherCAT, analog/RS-485 L-Protocol, or analog-only, selected by model code |
| Local interface | Top-mounted rotatable LCD plus an independent RS-485 micro-USB diagnostic service port |
What Does GP200-200367 Mean?
GP200 is the documented Brooks base model. The public GP200 ordering structure does not define the hyphenated 200367 suffix, so it cannot be used to infer the configured options.
| Segment | Field | Interpretation |
|---|---|---|
| GP200 | Base model | Brooks ultra-high-purity pressure-based mass flow-controller family |
| - | Identifier format | The public Brooks configuration code uses multiple option fields; the hyphen is not documented as one of those fields |
| 200367 | Part or assembly suffix | Not decoded in the current public GP200 model-code table; it does not establish gas, range, valve, bin, fitting, communications, pressure, auto-shutoff, or calibration options |
Full GP200 Configuration Fields
A complete Brooks GP200 ordering code identifies the configured unit through the following fields.
| Field | Documented choices |
|---|---|
| Valve configuration | Positive shut-off/zero-leak valve or normally closed metal-seat valve |
| Gas and range | Gas number plus full-scale range code |
| Bin configuration | CT40–CT48 standard bins or LP40–LP46 low-pressure bins |
| Fitting | CX C-Seal, WX W-Seal, VS male VCR, or LX C-Seal with poke-yoke |
| Communications and connector | EtherCAT, analog/RS-485, analog-only, or a defined DeviceNet I/O configuration |
| Customer special request | Factory-defined request field |
| Minimum inlet pressure | 15, 25, 35, or 45 psia option; low-pressure bins are application-configurable |
| Downstream condition | Vacuum, atmosphere, or positive pressure |
| Auto shut-off | Included or not included |
| Reference temperature | 00C denotes the standard 0°C reference calibration |
Exact Replacement Boundary
- Match the complete side-can model code rather than GP200-200367 alone.
- Confirm the programmed gas and full-scale range, valve type, bin, fitting, electrical interface, inlet-pressure option, downstream condition, and auto-shutoff setting.
- Brooks directs troubleshooting and configuration checks to the side-can label; re-zero the device in its installed attitude and at its operating temperature.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records1Tracked historical listing records
Historical median price$1,212.25Based on archived listing records
Recorded price range$1,212.25 - $1,212.25Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,212.25 to $1,212.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GP200-200367 Mass Flow Controller MFC AMAT 0190-89334 New
Archived listings
Other Part Numbers & Aliases
GP200-200367Brooks GP200-200367Brooks Instrument GP200-200367