Flow Control
GP200-200846
Brooks Instrument GP200 Series Pressure-Based Mass Flow Controller
About this part
The Brooks Instrument GP200-200846 is a GP200 Series ultra-high-purity, metal-sealed pressure-based mass flow controller for semiconductor gas delivery. GP200 devices use true differential-pressure measurement across a laminar flow element and a downstream control valve. Gas, range, valve seat, fitting, communications and pressure options are configuration-dependent and are not encoded by the publicly undocumented 200846 suffix
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | GP200-200846 |
| Manufacturer | Brooks Instrument, LLC |
| Series | GP200 Series |
| Product class | Ultra-high-purity, metal-sealed pressure-based mass flow controller for gases |
| Measurement principle | True differential-pressure measurement across a laminar flow element |
| Valve architecture | Normally closed downstream control valve; zero-leak PCTFE-seat and metal-seat configurations are offered |
| Published full-scale capability | 3 to 50,000 sccm N2 equivalent; the standard-bin ordering table lists nominal configurations from 10 to 45,000 sccm |
| Process-gas accuracy | Less than ±1% of setpoint from 5% to 100% full scale; below 5% full scale, limits depend on valve configuration |
| Repeatability and reproducibility | ±0.15% of setpoint from 5% to 100% full scale; ±0.015% of full scale in the documented lower control range |
| Matched transient response | 280 ±20 ms for ascending or descending non-zero setpoints; faster response is available by customer special request |
| Supply-pressure transient performance | Less than ±1% of setpoint during inlet-pressure spikes up to 40 psi/s |
| Operating temperature | 10 to 60°C; re-zeroing at ambient operating temperature is required |
| Operating inlet pressure | Application-dependent ranges include below 15 psia and nominal bands of 15–30, 25–40, 35–50 or 45–60 psia |
| Operating outlet pressure | Vacuum to atmosphere; up to 1200 Torr in supported applications |
| Design pressure | 150 psia |
| Burst pressure | 1000 psia |
| External leak integrity | 1 × 10^-10 atm·cc/s helium |
| Wetted materials | 316L, Hastelloy C-22, 316/316L stainless steel, 304 stainless steel, KM-45 and PCTFE |
| Wetted-surface finish | 5 µin Ra average |
| Communication options | EtherCAT, DeviceNet, analog 0–5 V with RS-485 L-Protocol, or analog-only; exact interface is model-specific |
| Diagnostics | Independent RS-485 diagnostic service port through micro-USB |
| Display | Rotatable top-mounted LCD showing flow, temperature, pressure and network information |
| Gas and range programming | Embedded MultiFlo gas model supports application-qualified gas and range reconfiguration |
What Does GP200-200846 Mean?
Brooks' public GP200 description code supports decoding only the GP200 base-model segment. The remaining identifier is not a published configured-option code.
| Segment | Field | Interpretation |
|---|---|---|
| GP200 | Base model | Brooks ultra-high-purity pressure-based mass flow controller. |
| 200846 | Additional identifier | Not defined as a segment or option value in the public GP200 model-code tables; it does not establish the configured gas, range, valve, fitting or interface. |
Configuration Fields Requiring Unit-Specific Evidence
The public identifier is not a complete GP200 ordering code. Confirm these details from the side label, Brooks order record or readable configuration data.
- Calibrated process gas and configured full-scale range
- Standard or low-pressure bin number
- Zero-leak or metal-seat valve configuration
- C-Seal, W-Seal, VCR or Poke-Yoke fitting option
- EtherCAT, DeviceNet, analog/RS-485 or analog-only interface
- Customer-special-request options
- Minimum inlet-pressure and downstream-condition selections
- Auto-shutoff and reference-temperature selections
GP200 Valve-Dependent Performance
The exact valve configuration of GP200-200846 is not established. Brooks specifies different low-range and leak-by performance for the two available valve designs.
| Property | Positive Shut-off / Zero Leak-by Valve | Normally Closed Metal-Seat Valve |
|---|---|---|
| Control range | 0.5–100% full scale | 2–100% full scale |
| Accuracy below 5% full scale | Less than ±0.05% full scale from 0.5–5% | Less than ±0.05% full scale from 2–5% |
| Leak-by at 45 psia to vacuum | Less than 0.005% of bin full scale for bins 42–46; less than 0.02% for bins 40–41 | Less than 0.15% of bin full scale |
| High-flow availability | Not offered with standard bins CT47–CT48 in the published tables | Available subject to product sizing |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,202.26 to $1,202.26. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GP200-200846 Mass Flow Controller MFC 1000 SCCM N2 New