Flow Control
GP200-200847
Brooks Instrument GP200 Series Pressure-Based Mass Flow Controller
About this part
Brooks Instrument GP200-200847 identifies a GP200-series ultra-high-purity, metal-sealed pressure-based mass flow controller for semiconductor process gases. GP200 controllers use differential-pressure measurement, a downstream control valve, and an embedded gas model supporting gas and range reconfiguration. GP200-200847 is not the complete published configuration code; its valve, calibrated gas/range page, bin, fitting, communications interface, pressure configuration, and special options cannot be decoded from this identifier alone
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | GP200-200847 |
| Manufacturer | Brooks Instrument |
| Product family | GP200 Series |
| Instrument type | Ultra-high-purity pressure-based mass flow controller for gases |
| Measuring principle | True differential-pressure measurement using a laminar flow element |
| Configurable full-scale flow range | 3 to 50,000 sccm, N2 equivalent; the exact configured range is unit-specific |
| Process-gas flow accuracy | Less than ±1% of setpoint from 5% to 100% full scale; below 5% full scale, less than ±0.05% full scale over the valve-specific control range |
| Control range | Zero-leak valve: 0.5% to 100% full scale; metal-seat valve: 2% to 100% full scale |
| Repeatability and reproducibility | ±0.15% of setpoint from 5% to 100% full scale; ±0.015% full scale over the valve-specific lower range |
| Matched transient response | 280 ±20 ms for ascending or descending non-zero setpoints; faster response is a customer-special option |
| Supply-pressure disturbance | Flow held within ±1% of setpoint for inlet-pressure spikes up to 40 psi/second |
| Outlet-pressure capability | Vacuum to atmosphere, with operation up to 1200 Torr for supported applications |
| Operating temperature | 10°C to 60°C; zeroing at ambient operating temperature is required |
| Design pressure | 150 psia |
| Burst pressure | 1,000 psia |
| External leak integrity | 1 × 10^-10 atm·cc/s helium |
| Wetted materials | 316L, Hastelloy C-22, 316/316L stainless steel, 304 stainless steel, KM-45, and PCTFE |
| Surface finish | 5 µin Ra average |
| Valve configurations | Positive shut-off/zero-leak valve or normally closed valve with metal seat; exact option is not established for GP200-200847 |
| Fittings | 92 mm C-seal, 92 mm W-seal, 124 mm 1/4-inch male VCR, or 92 mm C-seal with poke-yoke; exact fitting is not established for GP200-200847 |
| Communications | EtherCAT, DeviceNet, analog 0–5 V, or analog/RS485 depending on model code; exact interface is not established for GP200-200847 |
What Does GP200-200847 Mean?
Only the GP200 segment is defined by the published manufacturer model code. The suffix does not disclose the configured options.
| Segment | Field | Interpretation |
|---|---|---|
| GP200 | Base model code | Ultra-high-purity pressure-based mass flow controller for gases. |
| - | Separator | A hyphen at this position is not defined in the published GP200 configuration-code structure. |
| 200847 | Identifier suffix | Not a published GP200 option value. Do not decode it as the valve, gas/range, bin, fitting, interface, pressure setting, or customer-special code. |
Configuration Fields That Remain Unit-Specific
The full manufacturer model code or readable unit label is required to establish these details.
- Valve configuration
- Gas and full-scale range page
- Standard or low-pressure bin configuration
- C-seal, W-seal, VCR, or poke-yoke fitting
- EtherCAT, DeviceNet, analog, or RS485 interface
- Customer-special request code
- Minimum inlet-pressure range
- Vacuum, atmospheric, or positive downstream condition
- Auto-shutoff selection
- Reference-calibration temperature
Gas-Page and Service Note
Each GP200 contains an embedded gas model and can be reconfigured for supported gases and ranges. A marketplace description of SF6 at 455 SCCM therefore represents an observed configuration, not an immutable family specification. Before installation or return to service, verify the active gas page, full-scale setting, complete model code, process compatibility, and zero condition.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,202.26 to $1,202.26. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GP200-200847 Mass Flow Controller MFC 455 SCCM SF6 New