Flow Control
SLA5850
Brooks Instrument SLA5800 Series Digital Mass Flow Controller
About this part
SLA5850 is a Brooks Instrument SLA5800 Series elastomer-sealed digital thermal mass flow controller model. Official Brooks documentation identifies SLA5850 as an MFC platform in the SLA5800 family; exact gas, full-scale calibration, fittings, seals, valve behavior, and communication options remain configured-unit details that should be verified from the complete model code, unit label, or calibration record
Unit-specific configuration
Historical listing records identify this part as AIR at 500 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Device type | Elastomer-sealed digital thermal mass flow controller |
| Series family | Brooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters |
| Model role | Brooks documentation lists SLA5850 as a mass flow controller model; SLA5860 is the corresponding lower-flow mass flow meter model in the same family |
| SLA5850 family range context | Brooks SLA5800 data-sheet documentation lists SLA5850/SLA5860 model-class ranges from 0.003 slpm to 30 slpm N2 equivalent, with a coplanar-valve option up to 50 slpm N2 equivalent; the exact configured range is nameplate/calibration dependent |
| Gas/range programmability | The SLA5800 platform supports selectable calibration pages and MultiFlo-related gas/range flexibility on applicable configurations |
| Configured-unit rule | Gas, full-scale range, process connections, seals, valve state, power, and digital communications vary by configured code |
| Series accuracy context | SLA5800 data-sheet documentation provides model-family accuracy specifications; exact accuracy should be tied to the configured calibration and option package rather than inferred from the base SLA5850 identifier alone |
| Repeatability and response | SLA5800 data-sheet documentation lists high repeatability and sub-second response context for SLA5850/SLA5860 class devices, subject to configuration and calibration conditions |
| Digital platform | SLA5800 devices support analog and digital communication options depending on configuration, including RS-485/analog and fieldbus or Ethernet-based variants documented by Brooks |
| Application domain | Chemical and petrochemical research, laboratory, analytical, fuel-cell, life-science, production, and process gas handling applications |
| Stored auction gas/range combinations | AIR 500 SCCM (1), AIR 1000 SCCM (1), 500 SCCM (1); these are stored listing observations, not official model-wide specifications |
Documentation Downloads
Local PDF copiesPart Photos
9 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $150.00 to $813.59. Based on 8 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- LowTariff✅ Brooks SLA5850 Mass Flow
- LowTariff Brooks SLA5850 Mass Flow