Flow Control

SLA5850S1BDD1C2A1

Brooks Instrument SLA5850 Digital Thermal Mass Flow Controller

About this part

SLA5850S1BDD1C2A1 is a configured Brooks Instrument SLA5850 / SLA5800 Series elastomer-sealed digital thermal mass flow controller identifier. Stored auction and exact listing evidence confirm the part as a Brooks thermal mass flow controller, but do not provide a reliable gas or full-scale range. Brooks SLA5800 documentation covers SLA5850, SLA5851, and SLA5853 controllers plus related SLA5860-series meters; gas, range, process connection, seal package, valve state, and communication option remain configured-unit details that should be verified from the unit label

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (3)Photos (11)Listing history

Brooks SLA5850S1BDD1C2A1 SLA5800 Series auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Instrument

Part numberSLA5850S1BDD1C2A1

Product familySLA5800 Series

Device typeMass Flow Controller

Configuration statusConfiguration varies

Application classSemiconductor/high-purity gas delivery

CategoryFlow Control

Specifications

Identification

Device type	Elastomer-sealed digital thermal mass flow controller for gases
Series family	SLA5800 Series
Related documented controller models	SLA5850, SLA5851, and SLA5853
Observed part identity	Stored auction titles and exact listing records identify SLA5850S1BDD1C2A1 as a Brooks Instrument thermal mass flow controller

Configuration

Configured-unit rule

Gas, full-scale range, process connections, seal material, valve state, electrical interface, and digital communications vary by configured code

Applications

Application domain

Advanced gas handling, production, laboratory, analytical, chemical and petrochemical research, fuel cell, life science, and process gas control

Flow

SLA5850 range capability	0-3 ccm to 0-30 lpm N2 equivalent; up to 0-50 lpm with coplanar valve option
Overall SLA5800 family range	Less than 3 ccm to 2500 lpm N2 equivalent across the SLA5800 family
Observed gas/range status	No verified gas or full-scale range is currently available in stored titles or exact listing records for this configured code

Performance

Accuracy	+/-1.0% of rate from 20-100% full scale and +/-0.2% full scale below 20% full scale up to 1100 lpm
Repeatability	+/-0.20% of rate
Control range	50:1 turndown; 100:1 turndown with coplanar valve option for 1-50 lpm N2 equivalent full-scale ranges
Settling time	Less than 1 second to within +/-2% full scale for a 0-100% command step up to 100 lpm
Long-term drift	Less than 0.2% per year

Calibration

Selectable calibration curves

Storage of up to 10 selectable calibration curves

Controls

Analog interface	15-pin D-connector with 0(1)-5 V or 0(4)-20 mA setpoint and flow signals, depending on configuration
Digital communication options	RS-485 / HART-based S-protocol, DeviceNet, FOUNDATION Fieldbus, Profibus, EtherNet/IP, and EtherCAT options depending on configuration and revision
Gas/range programmability	MultiFlo gas and range programmability is supported on applicable SLA5800 configurations

Electrical

Power supply context

Analog option 13.5-27 Vdc; digital options vary by protocol

Ratings

Pressure rating context	SLA5850/SLA5860 model family is listed at 100 bar / 1500 psi; optional higher-pressure versions exist for selected body styles
Operating ambient temperature	0 to 65 C
Non-operating ambient temperature	-25 to 100 C
Leak integrity	1 x 10^-9 atm scc/sec helium maximum, inboard to outboard

Materials

Wetted materials

Stainless steel wetted parts with Viton fluoroelastomers standard; optional Buna-N, Kalrez, Teflon/Kalrez, and EPDM seal materials

Connections

Process connection context

Flow-through, flange, coplanar valve, and elastomer downport connection configurations are available depending on model and configured code

Documentation Downloads

Local PDF copies

Brooks SLA5800 Series Data Sheet Local PDF download

PDF918 KB

Brooks SLA5800 Series Installation and Operation Manual Local PDF download

PDF7.5 MB

Brooks SLA5800 Series Quick Start Guide Local PDF download

PDF681 KB

Part Photos

11 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records5Tracked historical listing records

Historical median price$600.00Based on archived listing records

Recorded price range$49.60 - $2,688.00Low to high recorded listing price

Local documents3PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $209.76 to $1,932.80. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

Brooks Instrument Thermal Mass Flow SLA5850S1BDD1C2A1
BROOKS INSTRUMENT SLA5850S1BDD1C2A1 NSMP

Archived listings

Other Part Numbers & Aliases

SLA5850S1BDD1C2A1SLA5850S1 BDD1C2A1Brooks SLA5850S1BDD1C2A1Brooks Instrument SLA5850S1BDD1C2A1SLA5850S1BDD1C2A1 Mass Flow ControllerSLA5850S1BDD1C2A1 MFC