Brooks Instrument SLA5850 Digital Mass Flow Controller
About this part
SLA5850D1EDG1A2A1 is a configured Brooks Instrument SLA5850 digital thermal mass flow controller in the SLA5800 Series. Official Brooks documentation identifies the SLA5800 Series as elastomer-sealed digital gas mass flow controllers and meters, identifies SLA5850 as a controller model paired with SLA5860 as the corresponding meter model, and documents DeviceNet as one of the supported digital communication options. The full configured code should be treated as unit-specific: gas, full-scale range, fittings, elastomer package, valve state, calibration, and installed communication details should be verified from the nameplate, calibration record, or Brooks build record. Stored Sonisys auction evidence for this exact identifier includes observed O2 250 SCCM and N2 context; these are observed configurations, not official universal specifications
Unit-specific configuration
Observed configuration
Historical listing records identify this part as O2 at 250 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal gas mass flow controller
Series family
Brooks SLA5800 Series elastomer-sealed digital gas mass flow controllers and meters
Model role
SLA5850 is the lower-flow SLA5800 Series mass-flow-controller model; Brooks documentation pairs it with SLA5860 as the corresponding mass-flow-meter model
Configured part number
SLA5850D1EDG1A2A1
Controls
SLA5850D interface context
Official SLA5800 documentation includes DeviceNet among supported digital communication options for SLA5800 Series MFCs; installed interface details should still be checked against the unit label and connector
Flow
SLA5850 family range context
Official SLA5800 documentation lists SLA5850/SLA5860 family flow-range context down to 0.003 slpm N2 equivalent and up to 50 slpm N2 equivalent depending on configuration; exact gas and full-scale flow are unit-specific
Gas/range flexibility
SLA5800 documentation describes multi-gas and multi-range capabilities on applicable configurations; this does not make the observed auction gas or range an official universal specification for this exact configured identifier
Configuration
Configured-unit rule
Gas, full-scale range, process connections, elastomer materials, valve state, pressure limits, power, communication interface, and calibration options vary by configured code and unit calibration
Performance
Series accuracy context
SLA5800 data-sheet accuracy specifications are tied to calibration conditions, model package, and flow range; exact accuracy should be treated as configuration- and calibration-dependent
Repeatability and response
SLA5800 data-sheet documentation lists repeatability/reproducibility as 0.20% of set point and response time under 1 second for SLA5850/SLA5860 class devices under specified conditions
Pressure
SLA5850 family pressure context
SLA5800 data-sheet documentation lists pressure ratings by model and configuration, including SLA5850/SLA5860 standard family context up to 1500 psi / 103 bar and optional higher-pressure configurations under specified limits
Electrical
Communication options
SLA5800 documentation includes analog/RS-485, Profibus, DeviceNet, EtherCAT, EtherNet/IP, and PROFINET communication contexts; a specific unit should be verified by connector, label, and configuration record
Materials
Family wetted-material context
SLA5800 data-sheet documentation lists stainless steel and high-alloy wetted-material context with elastomer options including Viton, Buna-N, Kalrez, Teflon/Kalrez, and EPDM depending on configuration
Environmental
Operating temperature context
SLA5800 data-sheet documentation lists family operating temperature context; hazardous-area certifications and special packages can impose narrower limits
Applications
Application domain
Chemical and petrochemical research, laboratory, analytical, fuel-cell, life-science, production, and process gas flow control applications
Observed variants
Observed gas/range context
Stored Sonisys auction evidence records O2 250 SCCM on one exact-code listing and N2 context on one exact-code listing; these are observed configurations, not official universal specifications
