Brooks Instrument SLA5800 Series Mass Flow Controller
About this part
SLA5850S1EAF4C2A1 is a configured Brooks Instrument SLA5850 SLA5800 Series elastomer-sealed digital thermal mass flow controller. Sonisys auction history and an exact listing records identify observed H2 service context, including one exact sold listing described as 500 SLPH H2 and another stored completed listing described with 0-2500 psig wording. Brooks SLA5800 documentation covers the SLA5850 platform as an elastomer-sealed digital thermal MFC for advanced gas handling with analog/RS-485, DeviceNet, and FOUNDATION Fieldbus communication options depending on configured model code
Unit-specific configuration
Observed configuration
Historical listing records identify this part as H2 at 500 SLPH. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Configured part number
SLA5850S1EAF4C2A1
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks SLA5800 Series; SLA5850 mass flow controller platform
Observed configuration
Observed gas/range context
Stored auction evidence and an exact sold listing describe SLA5850S1EAF4C2A1 as H2 service, including 500 SLPH H2 in one sold listing
Observed pressure context
One stored completed title describes the unit as 0-2500 psig; pressure rating and fittings should be verified from the exact nameplate
Configuration
Configured-unit rule
Gas, full-scale range, valve package, seals, process connections, pressure rating, calibration, and communications are configured-unit attributes and should be verified from the exact label
Applications
Application domain
Advanced gas handling, production, laboratory, analytical, fuel-cell, life-science, and process gas control applications
Performance
SLA5850 flow range
Brooks SLA5800 documentation lists SLA5850/SLA5860 configured full-scale ranges from 0-3 ccm to 0-30 lpm N2 equivalent, with up to 0-50 lpm N2 equivalent using the coplanar valve option
Series flow range
The SLA5800 Series covers gas measurement and control from less than 3 ccm to 2500 lpm N2 equivalent across SLA5850, SLA5851, and SLA5853 controller platforms
Control range
Brooks documentation lists 50:1 turndown, or 100:1 turndown with the coplanar valve option
Accuracy
Brooks documentation lists +/-1.0% of rate from 20% to 100% full scale and +/-0.2% full scale below 20% full scale up to 1100 lpm at calibration conditions
Repeatability
Brooks documentation lists repeatability as +/-0.20% of rate
Settling time
Brooks documentation lists settling time of less than 1 second to within +/-2% full scale for a 0-100% command step for flows up to 100 lpm N2 equivalent
Adaptive Valve Control
Brooks SLA5800 documentation describes Adaptive Valve Control for reducing flow deviation caused by unexpected process-pressure variation
Controls
Calibration storage
Brooks SLA5800 documentation describes storage and pre-programming of up to 10 selectable gas calibrations
Analog and RS-485 option
SLA5800 analog/RS-485 versions use a 15-pin D-connector with 0(1)-5 V or 0(4)-20 mA setpoint and flow signals, valve override, alarm output, and HART-based RS-485 multidrop communication
Digital communication options
Brooks documentation lists DeviceNet and FOUNDATION Fieldbus digital I/O options depending on configuration
Electrical
Supply voltage
Brooks documentation lists 13.5-27 VDC for analog option, 11-25 VDC for DeviceNet I/O, and 14-27 VDC for FOUNDATION Fieldbus I/O
Pressure
Pressure sensitivity
Brooks documentation lists pressure sensitivity of +/-0.03% per psi up to 200 psig N2 equivalent
SLA5850 pressure rating context
Brooks SLA5800 data sheet lists SLA5850 pressure rating context of 100 bar / 1500 psi, with a 300 bar / 4500 psi option for 50, 60, and 61 series bodies
Leak integrity
Brooks documentation lists inboard-to-outboard leak integrity of 1x10^-9 atm scc/sec helium maximum
Materials
Wetted materials
Brooks documentation lists stainless steel wetted parts with Viton fluoroelastomers standard and Buna-N, Kalrez, Teflon/Kalrez, and EPDM options
Operating environment
Ambient temperature range
Brooks documentation lists operating ambient temperature from 0 degrees C to 65 degrees C
Fluid temperature range
Brooks documentation lists fluid temperature from 0 degrees C to 65 degrees C
