Brooks Instrument SLA5850 Digital Mass Flow Controller
About this part
SLA5850SB1AB1B2A1L4Y1AA is a configured Brooks Instrument SLA5850 digital thermal mass flow controller in the SLA5800 Series. Official Brooks documentation identifies SLA5850 as a controller model in the elastomer-sealed digital thermal mass-flow controller and meter family. Stored Sonisys auction evidence for this exact identifier includes 5 SLM observed configuration context, while non-official supplier-index evidence also associates the exact code with N2 and 5 SLM. Exact gas, full-scale calibration, fittings, seals, valve behavior, and communication details should be verified from the physical unit label or calibration record
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 5 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters
Model role
SLA5850 is the lower-flow SLA5800 Series mass-flow-controller platform; Brooks documentation pairs it with SLA5860 as the corresponding mass-flow-meter model
Configured part number
SLA5850SB1AB1B2A1L4Y1AA
Flow
SLA5850 family range context
Current official SLA5800 documentation lists SLA5850/SLA5860 standard N2-equivalent full-scale flow coverage from 0.003 slpm to 50 slpm; this does not establish the exact configured full-scale range for this unit
Gas/range programmability
The SLA5800 platform supports selectable calibration pages and MultiFlo-related gas/range flexibility on applicable configurations
Configuration
Configured-unit rule
Gas, full-scale range, process connections, seals, valve state, power, and digital communication options vary by configured code
Performance
Series accuracy context
Current SLA5800 data-sheet documentation lists standard flow accuracy as +/-0.9% of setpoint from 20-100% full scale plus +/-0.18% of full scale below 20% full scale, with 17025-certified device accuracy options also documented
Repeatability and response
SLA5800 data-sheet documentation lists repeatability and reproducibility as 0.20% of setpoint and response time under 1 second for SLA5850/SLA5860 class devices
Stability and sensitivities
SLA5800 data-sheet documentation lists zero stability under +0.2% full scale per year, pressure coefficient +/-0.03% per psi from 0-200 psi N2, and attitude sensitivity under 0.2% full scale after re-zeroing
Pressure
SLA5850 family pressure context
SLA5800 data-sheet documentation lists SLA5850/SLA5860 standard maximum operating pressure as 1500 psi / 103 bar, with optional or special higher-pressure configurations dependent on model and flow conditions
Controls
Digital platform
SLA5800 devices support analog and digital communication options depending on configuration; Brooks documentation includes RS485/analog, Profibus, DeviceNet, EtherCAT, EtherNet/IP, and PROFINET contexts
Electrical
Interface context
SLA5800 documentation lists analog/RS-485 variants with a 15-pin male Sub-D connection and digital bus variants with protocol-specific connectors; verify the installed interface from the connector and label
Materials
Family wetted-material context
SLA5800 documentation lists 316, 316/316L stainless steel, high-alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, Teflon/Kalrez, and EPDM as family wetted-material options
Environmental
Operating temperature context
SLA5800 data-sheet documentation lists an operating temperature range from -14 C to 65 C, with hazardous-area certifications limited to 0 C to 65 C
Applications
Application domain
Chemical and petrochemical research, laboratory, analytical, fuel-cell, life-science, production, and process gas handling applications
Observed variants
Stored auction gas/range combinations
Stored Sonisys auction evidence records 5 SLM on one tracked exact-code listing; this is observed configuration evidence, not an official universal specification
Non-official exact-code configuration context
One supplier-index result associates the exact configured code with N2 and 5 SLM; this is not official Brooks documentation and should be confirmed from the unit label or calibration record
