Sonisys Industrial Part Archive

Flow Control

SLA7850D1EGG1A2A1

Brooks Instrument SLA7850 Delta Class Smart Mass Flow Controller

About this part

SLA7850D1EGG1A2A1 is a configured Brooks Instrument SLA7850 Delta Class Smart Mass Flow controller identifier. Brooks-authored SLA7800 documentation found during research identifies SLA7850 and SLA7860 as Delta Class mass flow controller and meter models; stored Sonisys auction records for this exact code include N2 5 SLM, 5000 SCCM, and 10000 SCCM contexts. Because the official current Brooks site did not surface an exact hosted SLA7850 PDF in this pass, Sonisys keeps the page conservative and treats all gas/range values as observed auction configuration evidence

Unit-specific configuration
Observed configuration

Historical listing records identify this part as 10000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsPhotos (9)Listing history
Brooks Instrument SLA7850D1EGG1A2A1 SLA7850 mass flow controller auction imageArchived part photo ยท View gallery

Key Facts

ManufacturerBrooks Instrument
Part numberSLA7850D1EGG1A2A1
Product familySLA7800 Series
Device typeMass Flow Controller
Observed full-scale range10000 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeDelta Class Smart Mass Flow controller
Series familyBrooks SLA7800 / SLA7850 Delta Class Smart Mass Flow family
Configuration
Configured-unit ruleGas, full-scale flow, valve, fitting, seal package, power, and communication options vary by configured model code
Controls
Digital platformSLA7850 auction and legacy-document context identifies a smart digital MFC platform with DeviceNet context on some configurations
Applications
Application domainGas-flow measurement and control in semiconductor, process, laboratory, and industrial gas systems
Observed variants
Stored auction gas/range combinationsN2 5 SLM, 5000 SCCM, and 10000 SCCM contexts are present in stored title evidence

Part Photos

9 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records5Tracked historical listing records
Historical median price$299.00Based on archived listing records
Recorded price range$260.00 - $325.38Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $269.62 to $314.83. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks MFC SLA7850D1EGG1A2A1 Nitrogen 10000Sccm, 1Pcs, Free Expedited Shipping
  • [New]Brooks Delta Class Smart Mass Flow 5000Sccm Sla7850D1Egg1A2A1 Sla7850D1Egg1
  • Brooks MFC SLA7850D1EGG1A2A1 Nitrogen 10000Sccm, 1Pcs
  • BROOKS INSTRUMENT SLA7850D1EGG1A2A1 mass flow controller SLA7850D1EGG1A2A1
  • BROOKS SLA7850D1EGG1A2A1 Smart Mass Flow N2 5slm 4V D-NET USED MFC

Archived listings

Other Part Numbers & Aliases

SLA7850D1EGG1A2A1Brooks SLA7850D1EGG1A2A1Brooks Instrument SLA7850D1EGG1A2A1