Flow Control
SLA7850S1EGG1C2A1
Brooks Instrument SLA7850 Delta Class Smart Mass Flow Controller
About this part
SLA7850S1EGG1C2A1 is a configured Brooks Instrument SLA7850 Delta Class Smart Mass Flow controller identifier. Brooks-authored SLA7800/SLA7850 legacy documentation identifies SLA7850 and SLA7860 as Delta Class mass flow controller and meter models, while stored Sonisys auction records for this exact configured code include N2 and CO2 3000 SCCM contexts. Because no verified official exact configured-code PDF is currently available, Sonisys keeps gas, full-scale range, connector, fitting, valve, calibration, and host-tool details as unit-label or calibration-record checks rather than fixed model-wide specifications
Unit-specific configuration
Historical listing records identify this part as CO2 at 3000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Part identifier | SLA7850S1EGG1C2A1 |
| Device type | Delta Class Smart Mass Flow controller |
| Series family | Brooks SLA7800 / SLA7850 Delta Class Smart Mass Flow family |
| Base model interpretation | SLA7850S records align with the analog-I/O SLA7850 controller model family; exact connector and fitting details should be verified from the physical unit |
| Configured-unit rule | Gas, full-scale flow, valve behavior, fitting package, seal package, connector, calibration, and customer-specific options vary by configured model code and unit label |
| Analog I/O context | SLA7850S legacy model context includes analog-I/O configurations with 9-pin or 15-pin D-connector options; the installed connector must be confirmed from the unit |
| Application domain | Gas-flow measurement and control in semiconductor, process, laboratory, and industrial gas systems |
| Stored auction gas/range combinations | N2 context and CO2 3000 SCCM context are present in stored auction evidence for this exact configured code |
Part Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $152.74 to $174.75. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- USED Brooks SLA7850S1EGG1C2A1 Delta Class Smart Mass Flowmeter N2 Nitrogen Gas
- Brooks 318505-004 CO2 Gas Flow Meter 0-3000 SCCM SLA7850S1EGG1C2A1 - Untested