5850C is a legacy Brooks Instrument thermal mass flow controller identifier found in Sonisys auction history and marketplace/service references. Stored records show 5850C units configured for O2, Ar, and N2 with ranges including 100 sccm, 1000 sccm, and 10 slm. Exact gas, full-scale flow, calibration temperature, fittings, valve state, connector, and seal package vary by configured unit and must be verified from the physical label because no exact official 5850C datasheet was found
Unit-specific configuration
Observed configuration
Historical listing records identify this part as O2 at 100 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Thermal mass flow controller
Observed model
Brooks 5850C
Stored listing identity
Stored records identify 5850C as a Brooks mass flow controller / MFC
Flow
Observed O2 range
Stored auction records include O2 0-100 sccm / 100 sccm contexts
Observed N2 ranges
Stored auction records include N2 1000 sccm and N2 10 slm contexts
Observed Ar range
Stored auction records include an Argon 100 sccm context
Performance
Related 5850E family accuracy
Related Brooks 5850E documentation specifies +/-1% full scale at calibrated conditions, with +/-1.5% full scale for flow ranges greater than 20 slpm
Related 5850E family repeatability
Related Brooks 5850E documentation specifies 0.25% of rate repeatability
Related 5850E family response time
Related Brooks 5850E documentation specifies less than 3 seconds to within 2% of full-scale final value for a 0 to 100% command step
Pressure
Related 5850E family working pressure
Related Brooks 5850E documentation specifies 1500 psi maximum working pressure
Environmental
Related 5850E family operating temperature
Related Brooks 5850E documentation specifies 5 C to 65 C operating temperature
Electrical
Related 5850E command input
Related Brooks 5850E documentation specifies 0-5 Vdc command input with 200 k ohm input resistance
Related 5850E flow output
Related Brooks 5850E documentation specifies 0-5 Vdc output into 2000 ohms or greater
Related 5850E connector options
Related Brooks 5850E documentation lists 20-terminal card-edge and 15-pin DA-15P D-connector options
Controls
Related 5850E control features
Related Brooks 5850E documentation covers fast response control, soft start, valve override, low-command valve inhibit, valve off, valve test point/purge, and remote transducer input
Configuration
Configured-unit rule
Gas, full-scale range, fittings, valve state, connector, calibration temperature, and seal package vary by configured model code and should be verified from the physical unit label
Documents
Exact official datasheet
No verified exact official datasheet or manual is currently available for Brooks 5850C
Applications
Application domain
Semiconductor, laboratory, analytical, and process gas handling
