Brooks Instrument 5800E Series Elastomer-Sealed Analog Mass Flow Controller
About this part
5850E is a Brooks Instrument 5800E Series elastomer-sealed analog gas mass flow controller. Brooks documentation describes the 5850E flow controller as a mass-flow measurement device for accurately measuring and rapidly controlling gas flow, with a flow sensor, control valve, and integral electronic control system. Exact gas, full-scale range, fittings, connector style, valve state, and seal materials vary by configured model code and should be verified from the unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as O2 at 200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed analog thermal mass flow controller
Series family
Brooks 5800E Series; 5850E is the mass flow controller model in the 5850/5860 low-flow controller/meter pairing
Configuration
Configured-unit rule
Gas, full-scale flow range, process fittings, seal material, valve state, connector, and calibration are configured by full model code and nameplate
Applications
Application domain
Chemical and petrochemical research, laboratory, analytical, fuel cell, life science, semiconductor, and general gas handling applications
Function
Control architecture
5850E controller consists of a flow sensor, control valve, and integral electronic control system to produce stable gas flow
Performance
Flow accuracy
5800E data sheet lists flow accuracy as 1% full scale, including linearity at calibration conditions
Control range
5800E data sheet lists 50:1 control range
Repeatability and reproducibility
5800E data sheet lists 0.25% of rate
Settling time
5800E data sheet lists less than 3 seconds settling time within +/-2% full scale for a 0-100% command step
Zero stability
5800E data sheet lists less than +/-0.2% full scale per year
Flow
5850E / 5860E N2-equivalent flow range
5800E data sheet lists 5850/5860 minimum full scale of 0.003 slpm and maximum full scale of 30 slpm N2 equivalent
Pressure
5850E / 5860E pressure rating
5800E data sheet lists 1500 psi / 100 bar standard rating for the 5850/5860 model row
Controller pressure differential
5800E table lists controller minimum differential pressure of 5 psi / 0.35 bar and maximum differential pressure of 50 psi / 3.45 bar for the 5850E/5860E column
Environmental
Operating temperature
5800E data sheet lists 5 C to 65 C operating temperature range
Leak integrity
External leak integrity
5800E data sheet lists 1 x 10^-9 atm cc/sec helium external leak integrity
Mechanical
Valve types
5800E data sheet lists normally closed, normally open, and meter/no-valve configurations
Materials
Primary wetted materials
5800E data sheet lists 316L stainless steel, high alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, and Teflon
Electrical
Electrical connection
5800E data sheet lists 15-pin male Sub-D DA-15P or card-edge connector for controller models
Setpoint input
5800E data sheet lists 0 to 5 Vdc setpoint input with 200 kOhm input resistance for controller models
Output signal
5800E data sheet lists 0 to 5 Vdc output into a 2000 ohm or greater load
Reference output
5800E data sheet lists 5 Vdc +/-0.01 Vdc reference output with 2 kOhm maximum load
Controls
Valve override
5850E installation manual describes valve override for fully opening or closing the control valve independent of command setting
Soft start
5850E installation manual describes soft start as a flow-ramping function for processes that cannot tolerate rapid flow transition
