Brooks Instrument Smart-Series Thermal Mass Flow Controller
About this part
5850S/BC1CA1EB3AA1B1 is a configured Brooks Instrument 5850S/BC Smart-Series thermal mass flow controller. Official Brooks 5800-S documentation identifies 5850S/BC as a mass flow controller base with 0.008 to 30 ln/min full-scale range context, and the suffix decodes to 1/8 inch tube compression fittings, Viton seal/seat material, normally closed valve, digital communication plus 0-5 Vdc output, RS-232 at 9600 baud, no cable, standard response, standard calibration, +24 Vdc power, and safe-area classification. Stored auction records for this exact identifier list oxygen/O2 flow values that conflict between 50 SCCM and 500 SCCM, so the actual gas calibration and full-scale setting should be verified from the physical label or calibration record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
5850S/BC1CA1EB3AA1B1
Official base model
Brooks 5850S/BC Smart-Series mass flow controller
Series family
5800-S Smart-Series digital mass flow meters and controllers
Flow
5850S/BC flow range context
0.008 to 30 ln/min full-scale range class; actual gas and calibrated full-scale value are configured per unit
Mechanical
Process connection code
1C: 1/8 inch tube compression fittings
Materials
Seal and valve-seat code
A: Viton
Controls
Valve code
1: normally closed valve for the 5850/5851 controller series
Smart-Series features
Digital communication can expose flow, setpoint, totalizer, ambient temperature, operating settings, calibration data, controller settings, PID settings, and diagnostics
Electrical
Input/output code
E: digital communication with digital communication plus 0-5 Vdc output
Interconnection cable code
A: no cable
Power supply code
B: +24 Vdc standard selection
Communications
Communication code
B3: RS-232 at 9600 baud
Performance
Enhancement code
A: standard response, listed for 5850/5851 as less than 1 second
Family accuracy context
+/-0.7% of rate and +/-0.2% full scale at calibration conditions; optional enhanced accuracy is listed separately by Brooks
