Vacuum and Cryogenics
CMX1T25PN2X
Brooks Instrument XacTorr CMX45 500 Torr Capacitance Manometer
About this part
CMX1T25PN2X is a Brooks Instrument XacTorr CMX Series heated digital capacitance manometer identifier observed in stored auction records. The reliable model-code elements identify it as a CMX capacitance manometer, CMX45 heated-temperature variant, and T25 500 Torr full-scale pressure range. The remaining suffix characters should be verified against the physical label or order record before assigning connector, fitting, relay, calibration-orientation, or compliance details
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberCMX1T25PN2X
Product familyCMX Series
Device typeHeated digital capacitance manometer
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics
Specifications
Identification
| Device type | Heated digital vacuum capacitance manometer, also called a capacitance diaphragm gauge |
| Series family | Brooks XacTorr CMX Series |
| Reliable decoded model code | CMX = capacitance manometer; CMX1 = CMX45 heated model; T25 = 500 Torr full-scale pressure range |
| Unverified suffix boundary | The PN2X suffix is retained as part of the exact identifier, but connector, fitting, relay, calibration, and compliance details should be confirmed from the nameplate or order record |
Pressure
| Observed full-scale range | 500 Torr full-scale range is supported by the T25 model-code element and stored auction title evidence |
| CMX family full-scale ranges | 0.1, 0.2, 0.5, 1, 2, 5, 7.5, 10, 20, 50, 100, 200, 300, 500, and 1000 Torr; pascal-equivalent ranges are also available |
| Measurement type | Total pressure measurement by capacitance diaphragm sensing, independent of gas composition |
Performance
| CMX45 accuracy | +/-0.15% of reading from 10% of full scale to full scale, including hysteresis, linearity, and repeatability within the calibrated range at 21 degrees C; reference uncertainty excluded |
| Pressure response time | 40 milliseconds |
| Zero temperature coefficient | 0.002% full scale per degree C for heated 45, 100, and 160 degrees C variants |
| Span temperature coefficient | 0.02% of reading per degree C |
| Warm-up time | 2 hours for most ranges; 4 hours for full-scale ranges of 1 Torr or lower |
Sensor
| Sensor design | Patented Mark IV sensor design intended to improve stability and protect against process-gas deposition |
| Temperature control | Dual-zone temperature control for fast warm-up, precise temperature control, and rapid response to changes |
| Zero adjustment | Intelli-Touch zero adjustment with local push-button and remote zeroing; zeroing is inhibited if pressure is too high or the device is not warmed up |
Ratings
| CMX45 ambient operating temperature | 15 to 35 degrees C |
| Over-pressure limit | 17 psia or 125% of full scale, whichever is greater |
Materials
| Wetted materials | Inconel and/or AISI 316L stainless steel |
Electrical
| Analog output | 0-10 Vdc analog pressure output, 5 kOhm load |
| Analog connector options | 9-pin male D-sub or 15-pin male D-sub depending on configured model |
| Diagnostic interface | 2.5 mm RS-485 diagnostic port |
| Digital interface option | DeviceNet option with 5-pin Eurofast connector and ODVA/SEMI SIG vacuum gauge profile support on DeviceNet models |
| CMX45 power requirement | +24 Vdc +/-10% at 400 mA, or +/-15 Vdc at 300 mA |
Connections
| CMX family fitting options | 0.50 in OD tube stub, KF-10 flange, KF-16 flange, KF-25 flange, 8 VCR 1/2 in female, Mini CF, and 4 VCR 1/4 in female options are listed in the CMX model-code table |
Controls
| Digital functions on DeviceNet models | Read pressure, set zero, reset factory defaults, report run time, and change device address and baud rate |
| DeviceNet data-rate options | 125, 250, and 500 kbps with network lengths of 500 m, 250 m, and 100 m respectively |
Compliance
| EMC compliance context | Brooks CMX data sheet lists 2014/30/EU EMC Directive EN 61326-1:2013 |
| Environmental compliance context | Brooks CMX data sheet lists RoHS 2011/65/EU and 2015/863/EU plus REACH EC 1907/2006 |
Applications
| Application domain | Process vacuum measurement for semiconductor tools, thin-film processes, vacuum chambers, and other applications requiring stable gas-independent pressure measurement |
Documentation Downloads
Local PDF copiesPart Photos
14 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records10Tracked historical listing records
Historical median price$977.88Based on archived listing records
Recorded price range$209.00 - $1,788.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $281.00 to $1,711.50. Based on 10 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 853-047693-701 CMX1T25PN2X Capacitance Manometer, Range: 500torr
- 1PCS NEW Brooks Xfactor CMX45 CMX1T25PN2X Capacitance Manometer Via DHL or FedEx
- 1PC 853-047693-701 CMX1T25PN2X Brooks Vacuum Gauge #U6092D
- Brooks Xfactor CMX45 CMX1T25PN2X New Capacitance manometer Via Fedex or DHL
- Brooks Xfactor CMX45 CMX1T25PN2X Heated Digital Capacitance Manometer
- Brooks Instruments CMX45 CMX1T25PN2X Digital Xactor Cap Manometer,500Tor,US*8356
Archived listings
Other Part Numbers & Aliases
CMX1T25PN2XBrooks CMX1T25PN2XBrooks Instrument CMX1T25PN2XModel CMX1T25PN2XBrooks Model CMX1T25PN2XCMX45 CMX1T25PN2X853-047693-701 CMX1T25PN2X796-047693-701 CMX1T25PN2X