Flow Control
GF040
Brooks Instrument Series Elastomer-Sealed Mass Flow Controller / Meter
About this part
GF040 is the Brooks Instrument base-model/series identifier for GF40 elastomer-sealed digital gas mass flow controllers and meters. Official Brooks documentation identifies GF040 as the elastomer/range-flow base model up to 50 slpm, with gas/range, valve state, fittings, seals, and communication options selected by the configured model code. Sonisys records currently include two stored auction listings, observed as nitrogen 20000 SCCM and oxygen 5000 SCCM examples; those observations are unit-specific listing context, not model-wide default specifications
Unit-specific configuration
Historical listing records identify this part as N2 / nitrogen at 20000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Device type | Elastomer-sealed digital thermal gas mass flow controller or mass flow meter |
| Series/model | GF040 / GF40 Series |
| Base-model code | GF040; elastomer/range-flow base model for 0-50 slpm configurations |
| Configured-unit rule | Gas, full-scale flow, protocol, valve state, fittings, downstream condition, seals, and options are selected by the configured model code |
| Full-scale flow range | 3 sccm to 50 slm nitrogen equivalent, depending on configured gas/range |
| Flow accuracy | +/-1% of setpoint from 35-100% and +/-0.35% full scale from 2-35% |
| Gas/range configurability | MultiFlo-capable configurations can be set for supported gas calibrations and full-scale ranges; non-MultiFlo configurations require a specific gas/range code |
| Communication and I/O options | Available options include RS-485/analog, Profibus, DeviceNet, and EtherCAT depending on configuration |
| Valve configurations | Normally closed valve, normally open valve, or no-valve meter configurations are supported by model code |
| Materials and seals | Primary wetted materials include 316 stainless steel, Hastelloy C-22, 17-7 PH, and 430 stainless steel; elastomer seal options include Viton, Buna, Kalrez, and EPDM |
| Operating limits | Operating temperature 5-50 deg C; maximum operating pressure 150 psig; external leak integrity listed as 1x10^-9 atm cc/sec helium |
| Stored auction gas/range observations | Stored listing titles observed nitrogen 20000 SCCM and oxygen 5000 SCCM examples; these are auction observations, not model-wide defaults |
Documentation Downloads
Local PDF copiesPart Photos
9 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $204.00 to $244.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks GF040 0015005Ll Mass Flow Controller MFC 15-O2 Oxygen Gas 5000 SCCM
- Brooks GF040 0013020L Mass Flow Controller MFC N2 Nitrogen Gas 20000SCCM Range