Flow Control
GF040C
Brooks Instrument GF40 Series Elastomer-Sealed Mass Flow Controller
About this part
GF040C is a Brooks Instrument GF40 Series elastomer-sealed digital thermal mass flow controller or meter platform identifier. The GF40 family supports MultiFlo gas/range programmability, multiple communications options, elastomer seal selections, and configured fitting/valve packages. Exact gas, full-scale range, fitting, valve behavior, seal material, reference temperature, and customer special request options must be read from the complete configured model code and the physical label
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberGF040C
Product familyGF40 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Elastomer-sealed digital thermal mass flow controller or mass flow meter |
| Series family | GF40 Series / GF040 base-model family |
| Model-code role | GF040 is the base-model code for elastomer-sealed flow devices up to 50 slpm N2 equivalent; the following C identifies MultiFlo-capable configurability in the GF40 model-code table |
Flow
| Full-scale flow range | 3 sccm to 50 slm N2 equivalent at the GF40 family level |
| Accuracy | +/-1% of set point from 35% to 100% of full scale; +/-0.35% of full scale from 2% to 35% of full scale |
| Repeatability and reproducibility | Less than +/-0.2% of set point |
| Linearity | +/-0.5% of full scale, included in accuracy |
| Control range | 2% to 100% of full scale |
| MultiFlo programmability | Standard MultiFlo gas and range programmability with 10 bins on supported GF40 configurations |
Performance
| Settling time, normally closed valve | Less than 1 second within 2% for 0-10% through 0-100% steps |
| Settling time, normally open valve | Less than 3 seconds within 2% for 0-10% through 0-100% steps |
| Valve shut down | Less than 1% of full scale |
| Zero stability | Less than +0.5% of full scale per year |
| Pressure coefficient | 0.03% per psi from 0 to 50 psi on N2 |
Ratings
| Operating temperature range | 5 to 50 degrees C (41 to 122 degrees F) |
| Maximum operating pressure | 150 psig (10 bar) |
| Design proof pressure | 4000 psig (275 bar) |
| Differential pressure ranges | 7-45 psid for 3-860 sccm, 15-45 psid for 861-7200 sccm, and 25-45 psid for 7201-50000 sccm; high-density gases such as argon may require additional differential pressure |
Mechanical
| Valve configurations | Normally closed valve, normally open valve, or no-valve meter depending on configured model code |
| Primary wetted materials | 316 stainless steel, Hastelloy C-22, 17-7 PH, and 430 stainless steel at the GF40 family level |
| Seal and valve-seat options | Viton, Buna, Kalrez, or EPDM depending on configured model code |
| Surface finish | 32 microinch Ra |
| External leak integrity | 1 x 10^-9 atm cc/sec helium |
Connections
| Fitting options | 9/16-18 UNF, tube compression, 1/4 in VCR, 1/4 in VCO, 1/4 in NPT, 1/4 in RC, 6 mm tube compression, and 10 mm tube compression options appear in the GF40 model-code table |
Controls
| Communication interfaces | Analog/RS-485, Profibus, DeviceNet, and EtherCAT variants depending on configuration |
| Analog input/output options | 0-5 V, 0-10 V, 0-20 mA, and 4-20 mA options depending on protocol and connector package |
| Power range | Configuration-dependent DC supply ranges include 12-24 Vdc, 13.5-27 Vdc, and 11-25 Vdc protocol variants |
Compliance
| Compliance context | GF40 documentation lists CE/EMC, safe-area design to EN61010-1, RoHS, leak-test traceability, oxygen cleaning, calibration traceability, and material certification options |
Applications
| Application domain | Gas flow measurement and control for OEM equipment, semiconductor processes, solar, biotech, nanotechnology, research systems, vacuum processes, and other industrial gas applications |
Documentation Downloads
Local PDF copiesPart Photos
4 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records7Tracked historical listing records
Historical median price$100.00Based on archived listing records
Recorded price range$80.00 - $180.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $92.00 to $163.20. Based on 7 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instruments Mass Flow Controller GF040C
- New Mass Flow Controller Brooks Instruments GF040C
- Mass Flow Controller Brooks Instruments GF040C Brand New
- Mass Flow Controller Brooks Instruments GF040C Used
- Mass Flow Controller Brooks Instruments GF040C
Archived listings
Other Part Numbers & Aliases
GF040CBrooks GF040CBrooks Instrument GF040CGF040C Mass Flow ControllerGF040C MFC