Brooks Instrument GF40 H2 10 sccm Mass Flow Controller
About this part
GF040CXXC-0007010C-T2AVS4-XXXXAA-70F is a configured Brooks Instrument GF40 Series elastomer-sealed digital thermal mass flow controller. The official GF40 model-code table identifies GF040 as the elastomer-sealed 0-50 slpm platform, C as MultiFlo capable, XX as standard special application, C as normally closed valve, T2 as 1/4 in tube compression fitting, A as atmospheric downstream condition, V as Viton external seal and valve seat, P5 as Profibus/analog 0-5 V I/O, A as auto shut-off included, and 70F as the 21.1 degrees C / 70 degrees F reference-temperature option. Stored auction titles identify this configured unit as gas code 7-H2 with a 010 ccm / 10 sccm range; process use should still verify the physical label and calibration page
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks GF40 Series / GF040 elastomer-sealed mass flow controller and meter platform
Base-model code
GF040: elastomer-sealed GF40 platform with 0-50 slpm nitrogen-equivalent range capacity
Configuration
Configurability code
C: MultiFlo capable, with standard bins or specific gas/range selection
Special application code
XX: standard special-application field
Valve configuration
C: normally closed valve
Observed gas/range context
Stored auction titles identify this configured unit as gas code 7-H2 with 010 ccm / 10 sccm range
Flow
GF40 family full-scale flow range
3 sccm to 50 slm nitrogen equivalent
MultiFlo programmability
Standard MultiFlo gas and range programmability with 10 bins on supported GF40 configurations
Flow accuracy
+/-1% of set point from 35% to 100% of full scale; +/-0.35% of full scale from 2% to 35% of full scale
Repeatability and reproducibility
Less than +/-0.2% of set point
Linearity
+/-0.5% of full scale, included in accuracy
Control range
2% to 100% of full scale
Performance
Settling time
Normally closed valve less than 1 second within 2% for 0-10% through 0-100% steps
Valve shut down
Less than 1% of full scale
Zero stability
Less than +0.5% of full scale per year
Pressure coefficient
0.03% per psi from 0 to 50 psi on nitrogen
Ratings
Operating temperature range
5 to 50 degrees C (41 to 122 degrees F)
Maximum operating pressure
150 psig (10 bar)
Design proof pressure
4000 psig (275 bar)
Differential pressure range
7-45 psid for 3-860 sccm, 15-45 psid for 861-7200 sccm, and 25-45 psid for 7201-50000 sccm; high-density gases such as argon may require additional differential pressure
Connections
Fitting code
T2: 1/4 in tube compression
Process
Downstream condition
A: atmosphere
Materials
External seal and valve seat code
V: Viton external seal and Viton valve seat
Primary wetted materials
316 stainless steel, Hastelloy C-22, 17-7 PH, and 430 stainless steel at the GF40 family level
Surface finish
32 microinch Ra
External leak integrity
1 x 10^-9 atm cc/sec helium
Controls
Communication and connector code
P5: Profibus / analog with 0-5 V input and 0-5 V output, 9-pin female D connector / 15-pin male D connector
Diagnostic/service port
GF40 platform includes an independent service/diagnostic port for configuration, diagnostics, data logging, and troubleshooting
Auto shut-off code
A: auto shut-off included
Calibration
Reference temperature code
70F: 21.1 degrees C / 70 degrees F reference
Installation
Zeroing context
GF40 manual recommends warm-up and correct active gas page before zeroing; process use should verify the active gas page and calibration against the physical device
Compliance
Compliance context
GF40 documentation lists CE/EMC, safe-area design to EN61010-1, RoHS, leak-test traceability, oxygen cleaning, calibration traceability, and material certification options
Applications
Application domain
Process gas flow measurement and control for OEM equipment, semiconductor processes, solar, biotech, nanotechnology, vacuum processes, and industrial gas systems
